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- Head/media test
- Disk drive test
- Laser tuning
- Fiber optics
- Metrology
- Nanopositioning
- Scanning microscopy
- Scanning interferometry
- Biotechnology
- Micromanipulation, etc.
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P-772 nanopositioning stages are the smallest flexure-guided, piezo-driven positioning systems with integrated capacitive sensors currently available. They provide a positioning and scanning range of up to 10 µm, sub-nanometer resolution and ultra-fast response.
Nanometer Precision in Milliseconds
Careful attention to mass minimization, results in significant reduction in inertial recoil forces applied to the supporting structures, enhancing overall system response, throughput and stability with settling times in the millisecond range.
Furthermore our new digital control electronics with DDL (Dynamic Digital Linearization) can be used to increase linearity and effective bandwidth in scanning applications by up to 1000-fold (see p. see link).
AutoCalibration
For optimized operation and interchangeability of nanomechanisms and controllers, model P-772.1CD is equipped with an ID-chip which holds all calibration data and sends it to the digital controller (e.g. E-750.CP). Model P-772.1CL can be used with either analog or digital controllers.
Superior Accuracy Through Direct-Motion Metrology with Capacitive Sensors
P-772 stages are equipped with absolute-measuring, direct-metrology capacitive sensors. These sensors make possible motion linearity to 0.03% with effective resolution in the sub-nanometer range. They boast high bandwidth and exhibit no periodic errors.
Unlike conventional sensors, capacitive sensors measure the actual distance between the fixed frame and the moving part of the stage. This results in higher motion linearity, long-term stability, phase fidelity, and—because external disturbances are seen by the sensor immediately—a stiffer, faster-responding servo-loop. See p. see link ff. and p. see link ff. for more information.
Working Principle / Reliability
P-772 stages are equipped with the award winning PICMA® piezo drives, integrated into a sophisticated flexure guiding system. The wire-EDM-cut flexures are FEA modeled for zero stiction, zero friction and exceptional guiding precision. The ceramic-encapsulated PICMA® drives are more robust than conventional piezo actuators, featuring superior lifetime and performance in both dynamic and static applications.
Because guidance, actuators and sensors are all frictionless and maintenance-free, these nanopositioning systems achieve outstanding levels of reliability.
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Notes
See the “Piezo Drivers & Nanopositioning Controllers” section, p. see link ff. for our comprehensive line of low-noise control electronics.
See the “Selection Guide” on p. see link ff. for comparison with other nanopositioning systems.
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PDF Catalog Datasheet
