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- Metrology
- Nanopositioning
- Scanning microscopy
- Disk drive testing
- Fiber optics
- Scanning interferometry
- Biotechnology
- Micromanipulation
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P-780 piezo-driven, flexure-guided stages are extremely compact and fast devices, providing a positioning and scanning range of up to 80 µm with settling times of only a few milliseconds. The P-780 is designed for applications with loads up to 100 g. Closed-loop and open-loop versions are offered to fit your application.
Direct-metrology LVDT sensorP-780.20 models feature direct-measuring, non-contact LVDT sensors (direct metrology).
Unlike indirect strain-measuring, piezoresistive sensors, direct-metrology sensors measure the actual distance between the fixed frame and the moving part of the stage. This results in higher motion linearity, long-term stability, phase fidelity, and—because external disturbances are seen by the sensor immediately—a stiffer, faster-responding servo-loop. See p. see link ff and p. see link ff. for more information.
Working Principle / Reliability
P-780 nanopositioning stages are equipped with the award winning PICMA® piezo drives, integrated into a sophisticated single-module, flexure guiding system. The wire-EDM-cut flexures are FEA modeled for zero stiction, zero friction and exceptional guiding precision. The ceramic-encapsulated PICMA® drives are more robust than conventional piezo actuators, featuring superior lifetime and performance in both dynamic and static applications.
Because guidance, actuators and sensors are all frictionless and maintenance-free, these nanopositioning systems achieve outstanding levels of reliability.
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Notes
See the “Selection Guide” on p. see link ff. for comparison with other nanopositioning systems.
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PDF Catalog Datasheet
