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- Metrology
- Disk drive testing
- Wafer steppers
- Semiconductor equipment
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P-750 high-load, piezo-driven flexure-guided, nanopositioning stages are designed to provide motion in one axis with extremely low off-axis error. They feature a positioning and scanning range up to 75 µm with fast settling, on the order of a few milliseconds. Closed-loop versions with integrated capacitive and LVDT (linear variable differential transformer) feedback sensors are offered for enhanced accuracy and repeatability.
Superior Accuracy Through Direct-Motion Metrology
The capacitive-sensor equipped versions (P-750.10) permit motion linearity to 0.03% with effective resolution in the sub-nanometer range. PI capacitive sensors are absolute-measuring, direct-metrology devices that boast very high bandwidth and exhibit no periodic errors.
Unlike conventional indirect sensors, capacitive sensors measure the actual distance between the fixed frame and the moving part of the stage. They detect errors contributed by all components in the drive train—from the actuator through the flexures to the platform. This results in higher motion linearity, long-term stability, phase fidelity, and—because external disturbances are seen by the sensor immediately—a stiffer, faster-responding servo-loop. See p. see link ff. and p. see link ff. for more information.
P-750.10 models are equipped with lower-cost, direct-metrology LVDT sensors providing 10 nm resolution.
Dynamic Digital Control for Best Scanning Linearity
Use our new digital control electronics with DDL (Dynamic Digital Linearization) to in-crease linearity and effective bandwidth in scanning applications by up to 1000-fold (see p. see link). By virtually eliminating tracking errors, DDL also increases the usable travel range.
Working Principle / Reliability
P-750 nanopositioning stages are equipped with the award winning PICMA® piezo drives, integrated into a sophisticated single-module, flexure guiding system. The wire-EDM-cut flexures are FEA modeled for zero stiction, zero friction and exceptional guiding precision. The ceramic-encapsulated PICMA® drives are more robust than conventional piezo actuators, featuring superior lifetime and performance in both dynamic and static applications.
Because guidance, actuators and sensors are all frictionless and maintenance-free, these nanopositioning systems achieve outstanding levels of reliability.
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Notes
See the “Piezo Drivers & Nanopositioning Controllers” section, p. see link ff. for our comprehensive line of low-noise control electronics.
See the “Selection Guide” on p. see link ff. for comparison with other nanopositioning systems.
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PDF Catalog Datasheet
