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- Disc-drive-testing
- Metrology
- Nanopositioning
- Scanning microscopy
- Photonics / integrated optics
- Interferometry
- Biotechnology
- Micromanipulation
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P-752 series high-speed nanopositioning stages are extremely precise devices, providing a positioning and scanning range up to 30 µm with very rapid settling and extremely low tip/tilt errors. These stages were specially designed for high-speed dithering and disk drive testing applications.
Direct-Drive Design for Fastest Response
The direct-drive design, together with careful attention to mass minimization, results in significant reduction in inertial recoil forces applied to the supporting structures, enhancing overall system response, throughput and stability. In combination with the E-500 controller system the P-752.11C stage with 300 g load settles to better than 1% with less 10 msec.
P-752 stages are equipped with capacitive sensors providing sub-nanometer resolution and stability. PI's proprietary capacitive sensors measure position directly and without physical contact. They are free of friction and hysteresis, a fact which, in combination with the positioning resolution of well under 1 nm, makes it possible to achieve very high levels of linearity. Further advantages of direct metrology with capacitive sensors are the high phase fidelity and the high bandwidth of up to 10 kHz.
Automatic Configuration
The ".CD" versions are equipped with an ID-chip that stores all individual stage data and servo-control parameters. This data is read out automatically by the AutoCalibration function of PI's digital piezo controllers. Thus, digital controllers and nanopositioning stages with ID-chip can be operated in any combination.
Higher Precision in Periodic Motion
The highest dynamic accuracy in scanning applications is made possible by the DDL algorithm, which is available in most of PI's modern digital controllers. DDL eliminates tracking errors, improving dynamic linearity and usable bandwidth by up to three orders of magnitude!
High Reliability and Long Lifetime
The compact P-752 systems are equipped with preloaded
PICMA® high-performance piezo actuators which are integrated into a sophisticated, FEA-modeled, flexure guiding system. The PICMA® actuators feature cofired ceramic encapsulation and thus offer better performance and reliability than conventional piezo actuators. Actuators, guidance and sensors are maintenance-free and not subject to wear, and thus offer an extraordinary reliability.
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PDF Catalog Datasheet
