P-517  ·  P-527 Multi-Axis Piezo Scanner
High-Dynamics Nanoscanner for Scanning Probe Microscopy
P-527.2CL parallel-kinematic nanopositioning system
P-527.2CL parallel-kinematic nanopositioning system
  • Travel Ranges to 200 µm
  • Sub-Nanometer Resolution
  • Frictionless, High-Precision Flexure Guiding System
  • Capacitive Sensors for Highest Linearity
  • Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Clear Aperture 66 x 66 mm
  • Outstanding Lifetime Due to PICMA® Piezo Actuators
P-517, P-527 dimensions in mm, cable length 1.5 m
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Application Examples
  • Metrology
  • Interferometry
  • Optics
  • Lithography
  • Nanopositioning
  • Scanning microscopy
  • Mass storage device testing
  • Laser technology
  • Micromachining

P-517 and P-527 high-dynamics, multi-axis piezo-nanopositioning stages are available in XY θZ, XY and XYZ configurations featuring linear travel ranges to 200 x 200 x 20 µm and rotation ranges to 4 mrad. The 66 x 66 mm clear aperture is ideal for transmitted-light applications.
Z/tip/tilt versions in the same form factor are also offered as models P-518, P-528, P-558 (see Link) and as custom versions with up to six degrees of freedom.

Capacitive Sensors for Highest Accuracy
PI's proprietary capacitive sensors measure position directly and without physical contact. They are free of friction and hysteresis, a fact which, in combination with the positioning resolution of well under 1 nm, makes it possible to achieve very high levels of linearity. A further advantage of direct metrology with capacitive sensors is the high phase fidelity and the high bandwidth of up to 10 kHz.

Active and Passive Guidance for Nanometer Flatness and Straightness
Flexures optimized with Finite Element Analysis (FEA) are used to guide the stage. The FEA techniques provide for the highest possible stiffness in, and perpendicular to, the direction of motion, and minimize linear and angular runout. Flexures allow extremely high-precision motion, no matter how minute, as they are completely free of play and friction. Due to the parallel kinematics design there is only one common moving platform for all axes, minimizing mass, enabling identical dynamic behavior and eliminating cumulative errors. Parallel kinematics also allows for a more compact construction and faster response compared to stacked or nested designs. The high precision due to flexure guidance is further enhanced by Active Trajectory Control: Multi-axis nanopositioning systems equipped with both parallel kinematics and parallel direct metrology are able to measure platform position in all degrees of freedom against one common fixed reference. In such systems, undesirable motion from one actuator in the direction of another (cross-talk) is detected immediately and actively compensated by the servo-loops. This Active Trajectory Control Concept can keep deviation from a trajectory to under a few nanometers, even in dynamic operation.

Ceramic Insulated Piezo Actuators Provide Long Lifetime
Highest possible reliability is assured by the use of award-winning PICMA® multilayer piezo actuators. PICMA® actuators are the only actuators on the market with ceramic-only insulation, which makes them resistant to ambient humidity and leakage-current failures. They are thus far superior to conventional actuators in reliability and lifetime.

Application Articles, Background Information, External Links

Papers & Articles
Related Information:
P-733.2  ·  P-733.3 XY(Z) Piezo-Nanopositioning Stage
High-Precision XY(Z) Scanner Family with Aperture
P-541.2 – P-542.2 Piezo XY-Stage
Low-Profile XY Nanopositioning System with Large Aperture
P-561 · P-562 · P-563 PIMars XYZ Piezo System
High-Precision Nanopositioning Stage, 3 to 6 Axes
Parallel and Serial Kinematics / Metrology
E-725 Digital Piezo Controller
For 3-Axis High-Speed Precision Positioning Systems

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