P-518, P-528, P-558 Piezo Z/Tip/Tilt Stage
High-Dynamics with Large Clear Aperture
P-528 Z/tip/tilt piezo nanopositioning system
P-528 Z/tip/tilt piezo nanopositioning system
  • 1- and 3-Axis Versions
  • Closed-Loop Vertical / Tilt Range to 200 µm / 2 mrad (Open-Loop to 240 / 2.4)
  • Parallel Kinematics / Metrology for Enhanced Responsiveness & Multi-Axis Precision
  • Frictionless, High-Precision Flexure Guiding System
  • Outstanding Lifetime Due to PICMA® Piezo Actuators
  • Clear Aperture 66 x 66 mm
  • Capacitive Sensors for Highest Linearity
P-558, P-518, P-528 dimensions in mm
 
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Application Examples
  • Metrology
  • Interferometry
  • Optics
  • Lithography
  • Scanning microscopy
  • Mass storage device testing
  • Laser technology
  • Micromachining

P-5x8 series, Z/tip/tilt nanopositioners / scanners are open-frame, high-resolution, piezo-driven stages providing motion to 240 µm and 2.4 mrad with resolutions of up to 0.5 nm and 50 nrad. The 66 x 66 mm clear aperture is ideal for transmitted-light applications.

XY and XYZ multi-axis versions in the same form factor are also offered as P-517, P-527 (see link) models with six degrees of freedom are available upon request.

Capacitive Position Sensors for Higher Accuracy
PI's proprietary capacitive sensors measure position directly and without physical contact. They are free of friction and hysteresis, a fact which, in combination with the positioning resolution of well under 1 nm, makes it possible to achieve very high levels of linearity. A further advantage of direct metrology with capacitive sensors is the high phase fidelity and the high bandwidth of up to 10 kHz.

Excellent Guiding Accuracy
Flexures optimized with Finite Element Analysis (FEA) are used to guide the stage. FEA techniques are used to give the design the highest possible stiffness in, and perpendicular to, the direction of motion, and to minimize linear and angular runout. Flexures allow extremely high-precision motion, no matter how minute, as they are completely free of play and friction.

Flatness and Straightness is further enhanced by active trajectory control: Multi-axis nanopositioning systems equipped with both parallel kinematics and parallel direct metrology are able to measure platform position in all degrees of freedom against one common fixed reference. In such systems, undesirable motion from one actuator in the direction of another (cross-talk) is detected immediately and actively compensated by the servo-loops. This Active Trajectory Control Concept can keep deviation from a trajectory to under a few nanometers, even in dynamic operation.

Higher Precision in Periodic Motion
The highest dynamic accuracy in scanning applications is made possible by the DDL algorithm, which is available in PI"s modern digital controllers. DDL eliminates tracking errors, improving dynamic linearity and usable bandwidth by up to three orders of magnitude!

Ceramic Insulated Piezo Actuators Provide Long Lifetime
Highest possible reliability is assured by the use of award-winning PICMA® multilayer piezo actuators. PICMA® actuators are the only actuators on the market with ceramic-only insulation, which makes them resistant to ambient humidity and leakage-current failures. They are thus far superior to conventional actuators in reliability and lifetime.

Application Articles, Background Information, External Links

Papers & Articles
 
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