- Scanning microscopy
- Mask / wafer positioning
Low Profile, Optimized for Microscopy Applications
The P-541 Z stages and Z/tip/tilt stages are for ideal alignment, nano-focusing or metrology tasks in the nanometer range. They feature a very low profile of 16.5 mm, a large 80 x 80 mm aperture, and offer highly accurate motion with sub-nanometer resolution.
A variety of P-541 XY scanning stages with the same footprint are also available (see link). Due to the low-profile design, the stages can easily be integrated in high-resolution microscopes.
Choice of Position Sensors
PI's proprietary capacitive sensors measure position directly and without physical contact. They are free of friction and hysteresis, a fact which, in combination with the positioning resolution of well under 1 nm, makes it possible to achieve very high levels of linearity. A further advantage of direct metrology with capacitive sensors is the high phase fidelity and the high bandwidth of up to 10 kHz.
Alternatively, economical strain gauge sensors are available. PI uses a bridge configuration to eliminate thermal drift, and assure optimal position stability in the nanometer range.
Active and Passive Guidance for Nanometer Flatness and Straightness
Flexures optimized with Finite Element Analysis (FEA) are completely free of play and friction to allow extremely high-precision motion. The FEA techniques also optimize straightness and flatness and provide for the highest possible stiffness in, and perpendicular to, the direction of motion.
Due to the parallel-kinematics design there is only one common moving platform for all axes, minimizing mass, enabling identical dynamic behaviour and eliminiating cumulative errors. Parallel kinematics also allows for a more compact construction and faster response compared to stacked or nested designs.
Ceramic Insulated Piezo Actuators Provide Long Lifetime
Highest possible reliability is assured by the use of award-winning PICMA® multilayer piezo actuators. PICMA® actuators are the only actuators on the market with ceramic-only insulation, which makes them resistant to ambient humidity and leakage-current failures. They are thus far superior to conventional actuators in reliability and lifetime.