P-587 6-Axis Precision Piezo Stage
Long Scanning Range, Direct Position Measurement
P-587 piezo-driven parallel-kinematics nanopositioning / scanning stage with E-710.6CD 6-axis digital controller
P-587 piezo-driven parallel-kinematics nanopositioning / scanning stage with E-710.6CD 6-axis digital controller
  • For Surface Metrology, Scanning and Positioning in all Six Degrees of Freedom
  • 800 x 800 x 200 µm Linear Range
  • Up to 1 mrad Rotational Range
  • Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Direct Metrology with Capacitive Sensors for Highest Linearity
  • Outstanding Lifetime Due to PICMA® Piezo Actuators
  • Frictionless, High-Precision Flexure Guiding System
  • Active Trajectory Control in All 6 Degrees of Freedom
P-587 dimensions in mm
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Application Examples
  • Interferometry
  • Metrology
  • Nano-imprinting
  • Semiconductor testing
  • Semiconductor fabrication

The P-587.6CD is a unique, highly accurate, 6-axis scanning and positioning system based on piezo flexure drives. It provides a linear travel range of 800 x 800 x 200 µm and rota-tion ranges up to 1 mrad.

Direct Position Measurement with Sub-Nanometer Accuracy
PI"s proprietary capacitive sensors measure position directly and without physical contact. They are free of friction and hysteresis, a fact which, in combination with the positioning resolution of well under 1 nm, makes it possible to achieve very high levels of linearity. A further advantage of direct metrology with capacitive sensors is the high phase fidelity and the high bandwidth of up to 10 kHz.

Excellent Guiding Accuracy
Flexures optimized with Finite Element Analysis (FEA) are used to guide the stage. FEA techniques are used to give the design the highest possible stiffness in, and perpendicular to, the direction of motion, and to minimize linear and angular runout. Flexures allow extremely high-precision motion, no matter how minute, as they are completely free of play and friction. A flatness and straightness in the low nanometer range is achieved, important for surface metrology applications.

Parallel Kinematics and Metrology with Capacitive Sensors for High Trajectory Fidelity
In a parallel kinematics multi-axis system, all actuators act directly on one moving platform. This means that all axes move the same minimized mass and can be designed with identical dynamic properties. Parallel kinematics systems have additional advantages over serially stacked systems, including more-compact construction and no cumulative errors from the individual axes. Multiaxis nanopositioning systems equipped with direct metrology are able to measure platform position in all degrees of freedom against one common reference. In such systems, undesirable motion from one actuator in the direction of another (cross-talk) is detected immediately and actively compensated by the servo-loops. This Active Trajectory Control Concept can keep deviation from a trajectory to under a few nanometers, even in dynamic operation.

Automatic Configuration
PI digital piezo controllers and nanopositioning stages with ID-Chip can be operated in any combination, supported by the AutoCalibration function of the controller. Individual stage data and optimized servo-control parameters are stored in the ID-Chip and are read out automatically by the digital controllers.

Application Articles, Background Information, External Links

Papers & Articles
Related Information:
P-561 · P-562 · P-563 PIMars XYZ Piezo System
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