P-915K XY-Theta-Z Piezo Stage
3 Degrees of Freedom in the XY Plane
The P-915KPPS is equipped with FEA-modeled flexures for higher stiffness in all three directions of motion
The P-915KPPS is equipped with FEA-modeled flexures for higher stiffness in all three directions of motion
  • Travel Ranges 250 x 250 µm, 16 mrad
  • Frictionless, High-Precision Flexure Guiding System
  • High Stiffness >1 N/µm
  • Outstanding Lifetime Due to PICMA® Piezo Actuators
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