P-628K Long-Travel XY Piezo Stage with Nanometer Flatness
Novel Active Z-Axis Design Provides Real Time Runout Compensation
The P-628KHFS with an active Z-axis provides an improved straightness of travel with only 9.5 mm added height compared to an P-628.2 nano­positioning stage
The P-628KHFS with an active Z-axis provides an improved straightness of travel with only 9.5 mm added height compared to an P-628.2 nano­positioning stage
  • Closed-Loop Travel Range 800 x 800 µm (up to 1500 µm Possible)
  • Improved Straightness of Travel <1nm
  • High-Precision, Cost-Efficient
  • Resolution to 0.1 nm, 0.02% Positioning Accuracy
  • Frictionless, High-Precision Flexure Guiding System
  • Outstanding Lifetime Due to PICMA® Piezo Actuators
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