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- Photonics / integrated optics
- Micromachining
- Micromanipulation
- Semiconductor testing
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P-611 Z stages are piezo-based nanopositioning systems with 100 µm closed-loop travel range featuring a compact footprint of only 44 x 44 mm. The stages described here are part of the P-611 family of positioners available in 1- to 3-axis configurations. Equipped with ceramic-encapsulated piezo drives and a stiff, zero-stiction, zero-friction flexure guiding system, all P-611 piezo stages combine millisecond responsiveness with nanometric precision and extreme reliability.
The P-611.Z versions described here are ideally suited for use in applications such as micro-scopy, auto-focusing and photonics packaging.
Closed-Loop and Open-Loop Versions
High-resolution, fast-responding, strain gauge sensors (SGS) are applied to appropriate locations on the drive train and provide a high-bandwidth, nanometer-precision position feedback signal to the controller. The sensors are connected in a full-bridge configuration to eliminate thermal drift, and assure optimal position stability in the nanometer range.
The open-loop models are ideal for applications where fast response and very high resolution are essential, but absolute positioning is not important. They can also be used when the position is controlled by an external feedback system such as an interferometer, a PSD (position sensitive diode), CCD chip / image processing system, or the eyes and hands of an operator.
Versatility & Combination with Motorized Stages
The P-611 family of piezo stages comprises a variety of single- and multi-axis versions (X, XY, Z, XZ and XYZ) that can be easily combined with a number of very compact manual or motorized micropositioning systems to form coarse/fine positioners with longer travel ranges (see see link, see link ff).
High Reliability and Long Lifetime
The compact P-611 systems are equipped with preloaded PICMA® high-performance piezo actuators which are integrated into a sophisticated, FEA-modeled, flexure guiding system. The PICMA® actuators feature cofired ceramic encapsulation and thus offer better performance and reliability than conventional piezo actuators. Actuators, guidance and sensors are maintenance-free and not subject to wear, and thus offer an extraordinary reliability.
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PDF Catalog Datasheet
