- Scanning microscopy
- Quality assurance testing
- Semiconductor fabrication
These elevation stages are cost-effective, compact, piezo-based positioning systems with travel ranges of 100 µm. The space-saving design features a footprint of only 60 x 60 mm. The 20 x 20 mm clear aperture makes them ideally suited for sample positioning in microscopy. Equipped with PICMA® piezo drives and zero-stiction, zero-friction flexure guiding system, the series provides nanometer-range resolution and millisecond response time.
Position Servo-Control with Nanometer Resolution
High-resolution, broadband, strain gauge sensors (SGS) are applied to appropriate locations on the drive train and measure the displacement of the moving part of the stage relative to the base. The SGS sensors assure optimum position stability in the nanometer range and fast response.
The open-loop models are ideal for applications where fast response and very high resolution are essential, but absolute positioning is not important. They can also be used when the position is controlled by an external sensor such as an interferometer, a PSD (position sensitive detector), CCD chip / image processing system, or the eyes and hands of an operator.
High Reliability and Long Lifetime
The compact P-612 systems are equipped with preloaded PICMA® high-performance piezo actuators which are integrated into a sophisticated, FEA-modeled, flexure guiding system. The PICMA® actuators feature cofired ceramic encapsulation and thus provide better performance and reliability than conventional piezo actuators. Actuators, guiding system and sensors are maintenance-free, not subject to wear and offer an extraordinary reliability.