- Wafer inspection
- PCB inspection
Long Travel Range
The P-783 piezo nano-Z-axis stage is a compact, closed-loop actuator providing a positioning and scanning range of up to 300 µm. It is designed for applications with loads ranging from a few grams to a few hundred grams.
Direct-Metrology LVDT Sensor
P-783 stages feature direct-measuring, non-contact LVDT sensors (direct metrology).
Unlike indirect sensors, direct-metrology sensors measure the actual distance between the fixed frame and the moving part of the stage. This results in higher motion linearity, long-term stability, phase fidelity, and—because external disturbances are seen by the sensor immediately—a stiffer, faster-responding servo-loop. See p. see link ff. and p. see link ff. for more information.
Working Principle / Reliability
P-783 nanopositioning stages are equipped with the award winning PICMA® piezo drives, integrated into a sophisticated flexure guiding system. The wire-EDM-cut flexures are FEA modeled for zero stiction, zero friction and exceptional guiding precision. The ceramic-encapsulated PICMA® drives are more robust than conventional piezo actuators, featuring superior lifetime and performance in both dynamic and static applications.
Because guidance, actuators and sensors are all frictionless and maintenance-free, these nanopositioning systems achieve outstanding levels of reliability.
See the “Piezo Drivers & Nanopositioning Controllers” section, p. see link ff. for our comprehensive line of low-noise control electronics.
See the “Selection Guide” on p. see link ff. for comparison with other nanopositioning systems.