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- Wafer inspection
- Nanopositioning
- Medical analysis
- Biotechnology
- Optics
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The P-290 is a unique, piezoelectrically driven elevator stage providing a 1000 µm stroke. It is designed for high-resolution static and low-frequency dynamic positioning applications.
Working Principle
The P-290 is a vertical positioning platform based on a piezoelectric drive system. The drive system consists of two stacked piezo flexure tilt positioners (similar to P-287) machined from one solid piece of stainless steel. Each of the two tilt positioners is equipped with a high-voltage piezoelectric stack actuator (0 to -1000 V) integrated into a zero stiction, zero-friction, wire-EDM-cut flexure motion amplifier system. The positioning platform is guided by linear ball bearings to eliminate tilt.
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Notes
See the “Piezo Drivers & Nanopositioning Controllers” section, p. see link ff. for our comprehensive line of low-noise control electronics.
See the “Selection Guide” on p. see link ff. for comparison with other nanopositioning systems.
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PDF Catalog Datasheet
