P-620.1 – P-629.1 PIHera Piezo Linear Stage
Compact Nanopositioning System Family with Long Travel Ranges
PIHera piezo nanopositioning systems feature travel ranges from 50 to 1800 µm
PIHera piezo nanopositioning systems feature travel ranges from 50 to 1800 µm
  • Travel Ranges 50 to 1800 µm
  • High-Precision, Cost-Efficient
  • Resolution to 0.1 nm
  • Direct Metrology with Capacitive Sensors
  • 0.02% Positioning Accuracy
  • Frictionless, High-Precision Flexure Guiding System
  • Outstanding Lifetime Due to PICMA® Piezo Actuators
  • X-, XY-, Z-, XYZ Versions
  • Vacuum-Compatible Versions Available
Rapid scanning motion of a P-621.1CD (commanded rise time 5 ms) with the E-710 controller (<a class=Bildunterschrift href=http://www.physikinstrumente.com/en/products/prdetail.php?sortnr=600300>see link</a>) and Digital Dynamic Linearization (DDL) option. DDL virtually eliminates the tracking error (<20 nm) during the scan. The improvement over a classical PI controller is up to 3 orders of magnitude, and increases with the scanning frequency
 
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Application Examples
  • Interferometry
  • Microscopy
  • Nanopositioning
  • Biotechnology
  • Quality assurance testing
  • Semiconductor technology

Single-axis PIHera systems are piezo-nanopositioning stages featuring travel ranges from 50 to 1800 µm. Despite the increased travel ranges, the units are extremely compact and provide rapid response and high guiding precision. This and the long travel range is achieved with a friction-free and extremely stiff flexure system.

The PIHera piezo nanopositioning series also includes Z- and XY-stages (see link, see link).

Nanometer Precision in Milliseconds
One of the advantages of PIHera stages over motor-driven positioning stages is the rapid response to input changes and the fast and precise settling behavior. The P-622.1CD, for example, can settle to an accuracy of 10 nm in only 30 msec (other PI stages provide even faster response)!

Superior Accuracy With Direct-Metrology Capacitive Sensors
A choice of tasks such as optical path adjustment in interferometry, sample positioning in microscopy, precision alignment or optical tracking require the relatively long scanning ranges and nanometer precision offered by PIHera nanopositioning stages.

PI's proprietary capacitive sensors measure position directly and without physical contact. They are free of friction and hysteresis, a fact which, in combination with the positioning resolution of well under 1 nm, makes it possible to achieve very high levels of linearity. A further advantage of direct metrology with capacitive sensors is the high phase fidelity and the high bandwidth of up to 10 kHz.

Designed for Precision
High stiffness is achieved with the FEA-optimized design of the frictionless flexure elements, which assure excellent guiding accuracy and dynamics. A straightness and flatness in the nanometer range is achieved.


Application Articles, Background Information, External Links

Papers & Articles
 
Related Information:
 
P-611.1 Piezo Nanopositioner
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P-620.2 – P-629.2 PIHera XY Piezo Stage
High-Precision Nanopositioner Family-Compact and Long Travel Ranges
 
P-620.Z - P-622.Z PIHera Precision Z-Stage
Nanopositioning System Family with Direct Metrology and Long Travel Ranges
 
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