P-620.2 – P-629.2 PIHera XY Piezo Stage
High-Precision Nanopositioner Family-Compact and Long Travel Ranges
PIHera XY nanopositioning systems provide travel ranges from 50 x 50 µm to 1800 x 1800 µm
PIHera XY nanopositioning systems provide travel ranges from 50 x 50 µm to 1800 x 1800 µm
  • Travel Ranges 50 to 1800 µm
  • High-Precision, Cost-Efficient
  • Resolution to 0.1 nm
  • Frictionless, High-Precision Flexure Guiding System
  • 0,02% Positioning Accuracy
  • Outstanding Lifetime Due to PICMA® Piezo Actuators
  • X-, XY-, Z- and XYZ-Versions
  • Vacuum-Compatible Versions Available
P-62x.2CD/.2CL/.20L dimensions in mm
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Application Examples
  • Interferometry
  • Microscopy
  • Nanopositioning
  • Biotechnology
  • Quality assurance testing
  • Semiconductor technology

Two-axis (XY) PIHera systems are piezo-nanopositioning stages featuring travel ranges from 50 to 1800 µm. Despite the increased travel ranges, the units are extremely compact and provide rapid response and high guiding precision. This, and the long travel range is achieved with a friction-free and extremely stiff flexure system sub-nanometer resolution. The PIHera piezo nanopositioning series also includes Z and X stages (see link and see link).

Nanometer Precision in Milliseconds
One of the advantages of PIHera stages over motor-driven positioning stages is the rapid response to input changes and the fast and precise settling behavior. The P-622.1CD, for example, can settle to an accuracy of 10 nm in only 30 msec (other PI stages provide even faster response)!

Superior Accuracy With Direct-Metrology Capacitive Sensors
A choice of tasks such as optical path adjustment in interferometry, sample positioning in microscopy, precision alignment or optical tracking require the relatively long scanning ranges and nanometer precision offered by PIHera nanopositioning stages.
PI's proprietary capacitive sensors measure position directly and without physical contact. They are free of friction and hysteresis, a fact which, in combination with the positioning resolution of well under 1 nm, makes it possible to achieve very high levels of linearity. A further advantage of direct metrology with capacitive sensors is the high phase fidelity and the high bandwidth of up to 10 kHz.

Designed for Precision
High stiffness is achieved with the FEA-optimized design of the frictionless flexure elements, which assure excellent guiding accuracy and dynamics. A straightness and flatness in the nanometer range is achieved.

Application Articles, Background Information, External Links

Papers & Articles
Related Information:
P-541.2 – P-542.2 Piezo XY-Stage
Low-Profile XY Nanopositioning System with Large Aperture
P-611.1 Piezo Nanopositioner
Cost-Effective, Compact Linear Positioning System
P-612 XY Piezo Nanopositioning System
Compact, Clear Aperture
P-620.Z - P-622.Z PIHera Precision Z-Stage
Nanopositioning System Family with Direct Metrology and Long Travel Ranges
E-725 Digital Piezo Controller
For 3-Axis High-Speed Precision Positioning Systems
E-761 Digital Piezo Controller
Cost-Efficient PCI Board for Piezo Stages with up to 3 Axes
E-621 Piezo Servo-Controller & Driver
Modules with Fast 24-Bit Interface
E-625 Piezo Servo-Controller & Driver
Compact Bench-Top Device with High-Speed Interface

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