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- Interferometry
- Microscopy
- Nanopositioning
- Biotechnology
- Quality assurance testing
- Semiconductor technology
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Z-axis PIHera® systems are cost-efficient piezo nanopositioning stages featuring travel ranges up to 400 µm and provide sub-nanometer resolution. Despite the increased travel ranges, the units are extremely compact and provide sub-nanometer resolution. The long travel range is achieved with a friction-free and extremely stiff flexure system, which also offers rapid response and excellent guiding accuracy.
PIHera® piezo nanopositioning stages are also available as X- and XY-stages (see link and see link).
Nanometer Precision in Milliseconds
One of the advantages of PIHera® stages over motor-driven positioning stages is the rapid response to input changes and the fast and precise settling behavior. The P-622.1CD, for example, can settle to an accuracy of 10 nm in only 30 msec (other PI stages provide even faster response)!
Superior Accuracy With Direct-Metrology Capacitive Sensors
A choice of tasks such as optical path adjustment in interferometry, sample positioning in microscopy, precision alignment or optical tracking require the relatively long scanning ranges and nanometer precision offered by PIHera® nanopositioning stages.
PI's proprietary capacitive sensors measure position directly and without physical contact. They are free of friction and hysteresis, a fact which, in combination with the positioning resolution of well under 1 nm, makes it possible to achieve very high levels of linearity. A further advantage of direct metrology with capacitive sensors is the high phase fidelity and the high bandwidth of up to 10 kHz.
Designed for Precision
High stiffness is achieved with the FEA-optimized design of the frictionless flexure elements, which assure excellent guiding accuracy and dynamics. A straightness and flatness in the nanometer range is achieved.
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PDF Catalog Datasheet
