P-601 PiezoMove™ Z-Actuator
Flexure-Guided OEM Piezo Actuator with Long Stroke to 400 µm
PiezoMove™  Lever-amplified piezo actuators of the P-601 series
PiezoMove™ Lever-amplified piezo actuators of the P-601 series
  • Flexure Guidance for Frictionless, Ultra-Straight Motion
  • Travel Ranges to 400 µm
  • Resolution to 0.2 nm
  • High Dynamics and Stiffness
  • Custom Designs with Longer Travel or Faster Response and Non-Magnetic Versions Feasible
  • Outstanding Lifetime Due to PICMA® Piezo Actuators
  • Choice of Closed-Loop and Open-Loop Models
  • Ideal OEM Actuator for Precision Motion Control in Optics, Medical, Biotech and Microfluidics Applications
P-601 dimensions in mm
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Application Examples
  • Nanopositioning
  • Imaging
  • High-speed switching
  • Patch clamp
  • Micro-dispensing
  • Semiconductor testing
  • Adaptronics / Automation
  • Photonics / integrated optics
  • Biotechnology

The flexure-guided, lever-amplified PiezoMove™ P-601 actuators provide large vertical travel ranges up to 400 µm, fast response and high positioning accuracy in a very small package. With settling times of only a few milliseconds and a resolution in the sub-nanometer range they are well suited for both static and dynamic applications.

P-601 PiezoMove™ lever-amplified actuators cover the range between direct-driven preloaded piezo translators, such as the P-840 series (see link) and single-axis nanopositioning stages, like the P-611 series (see link). Compared to direct-driven piezo translators, lever-amplified actuators offer larger travel ranges and much higher lateral stiffness and guiding precision. Compared to single-axis nanopositioning stages, they offer significantly smaller sizes. PiezoMove™ lever-amplified actuators feature a resolution to 0.2 nm and a repeatability to 8 nm.

OEM Actuator with Integrated Guidance
With their highly precise, frictionless flexure guidance, a very high stiffness and excellent straightness of motion are achieved. Together with their small dimensions and the cost-effective design, the P-601 lever amplified actuators are especially suited for OEM applications. Versions with strain-gauge sensors (SGS) are equipped with a full bridge circuit that is insensitive to thermal drift. Versions without sensors are also available for open-loop applications such as in high-speed switches and pumps. In addition to the standard steel models, special invar and non-magnetic versions are available on request.

Ceramic Insulated Piezo Actuators Provide Long Lifetime
Highest possible reliability is assured by the use of award-winning PICMA® multilayer piezo actuators. PICMA® actuators are the only actuators on the market with ceramic-only insulation, which makes them resistant to ambient humidity and leakage-current failures. They are thus far superior to conventional actuators in reliability and lifetime.

Related Information:
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