P-915K Vacuum Compatible XYZ Piezo Scanner
Large Clear Aperture, High-Dynamics, High-Load Nanopositioner
The P-915KLVS high-dynamics scanner offers a very large clear aperture of 200 x 200 mm
The P-915KLVS high-dynamics scanner offers a very large clear aperture of 200 x 200 mm
  • Vacuum Compatible to 10-6 hPa
  • Direct Metrology with Capacitive Sensors
  • Excellent Straightness: <0.1 µrad Runout
  • Frictionless, High-Precision Flexure Guiding System
  • Direct Metrology with Capacitive Sensors
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