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- Semiconductor technology / test & measurement
- Data storage
- Automotive industry
- Metrology
- Precision machining
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The analog E-509.Ex sensor electronics is specially designed for the PISeca™ D-510 series of single-electrode, capacitive position sensor probes. Based on the E-500 modular controller system, it provides three channels of analog output featuring very high linearity, exceptional long-term stability, sub-nanometer position resolution and bandwidths up to 10 kHz.
Two models are available: E-509.E03 is a signal conditioner module. In addition, the E-509.E3 version includes a full servo-controller. With it, the position values from external single-plate capacitive sensors can thus be used for servo-control of piezo nanopositioning systems.
The combination of sensor and electronics provides a system for capacitive displacement measurement with flexible high-end solutions for best linearity and highest resolution.
Selectable Bandwidth and Measurement Range
The selectable bandwidth setting allows the user to adapt the system to different applications. For the highest accuracy and sub-nanometer resolution, the bandwidth can be limited to 300 Hz.
For high-dynamics applications, a bandwidth up to 10 kHz is possible, with a resolution still better than 4 nm.
Factory-set measurement ranges from 20 to 500 µm are possible, depending on the nominal measurement range of the selected sensor head.
Factory Calibration for Improved Linearity
Highest possible linearity and accuracy are achieved with factory calibration of the sensor electronics for the particular measurement range. Factory calibration also optimizes parameters like ILS (linearization), gain and offset and eliminates cable capacitance influences.
Position Servo Control with PISeca™
The position servo-control portion of the E-509 is identical for all versions, consisting of an analog P-I (proportional, integral) controller. Proportional and integral gain can be set internally. Control bandwidth can also be set. A notch filter allows operation of the piezo positioning system closer to its mechanical resonant frequency.
Multi-Channel Measurements
The three channels of the PISeca™ E-509.Ex sensor electronics are automatically synchronized for the use in connected sensor systems.
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PDF Catalog Datasheet
