This product family has been replaced by the following new product:
H-850 6-Axis Hexapod

If you need a replacement part, please contact PI.

Information for replaced product (old datasheet below):

M-850 Hexapod 6-Axis Positioning System
High-Load Parallel-Kinematics Micropositioner with Controller, to 2000 N
M-850 Hexapod Microrobot
M-850 Hexapod Microrobot
  • Six Degrees of Freedom
  • Works in Any Orientation
  • No Moving Cables for Improved Reliability and Precision
  • Up to 250 kg Load Capacity (Vertical)
  • Heavy-Duty, Ultra-High-Resolution Bearings for 24/7 Applications
  • Repeatability to ±1 µm
  • Encoder Resolution to 0.005 µm
  • Significantly Smaller and Stiffer than Serial-Kinematics Systems, Better Dynamics
  • Vacuum-Compatible Versions Available
  • Linear and Rotary Multi-Axis Scans
  • Virtual Pivot Point
  • Sophisticated Controller Using Vector Algorithms
  • MTBF 20,000 h
Custom Hexapod designed for <br>neurosurgery Photo: IPA
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Application Examples
  • Alignment of secondary mirrors
  • Semiconductor technology
  • Optics alignment
  • Medical technology
  • Micromachining
  • Micromanipulation
  • X-ray diffraction measurements
  • Satellite testing equipment
  • Tool control

The M-850 is the ideal micropositioning system for all complex positioning tasks which depend upon high load capacity and accuracy in six independent axes. The use of extremely stiff and accurate components for the M-850 Hexapod results in an unusually high natural frequency of 500 Hz with a 10 kg load. In addition to positioning all axes with resolutions in the submicron and arcsecond ranges, it allows the user to define the center of rotation (pivot point) anywhere inside or outside the system envelope by one simple software command.

The M-850.50 model can achieve velocities of up to 8 mm/s. In contrast, the M-850.11 model with a higher gear ratio can achieve a load capacity of 250 kg vertically and 50 kg in any orientation.

Hexapod vs. Serial Kinematics Systems
The Hexapod is driven by six high-resolution actuators all connected directly to the same moving platform. This design provides a high system stiffness and a large clear aperture.

Because of the low mass of the moving platform, positioning operations can be performed with far lower settling times than with conventional, stacked multi-axis systems. In such systems, runout, guiding errors, and the friction and inertia of moving cables all accumulate to limit accuracy and repeatability—problems which do not affect parallel kinematic systems like the Hexapod.

Fixed Virtual Pivot Point
For optics and other alignment tasks, it is important to be able to define a fixed pivot point. The sophisticated Hexapod controller allows choosing any point in space as the pivot point for the rotation axes by software command. The pivot point remains fixed relative to the platform.

Target positions in 6-space are entered in user-friendly coordinates and reached by smooth vectorized motion.

Open Architecture
Control of the hexapod is facilitated by the controller“s open interface architecture, which provides a variety of high-level commands and includes a macro language for programming and storing command sequences.

Automatic Optical Alignment
With the internal or external photometer option and the integrated scanning routines, just a few commands are needed to perform an automated alignment of optical components. For more information on photometers / optical power meters, see

A smaller, even-more-precise hexapod, specially developed for alignment of collimators, fiber bundles and I/O chips, is available as the F-206 (see link).

Application Articles, Background Information, External Links

Papers & Articles
Related Information:
P-587 6-Axis Precision Piezo Stage
Long Scanning Range, Direct Position Measurement
H-840 6-Axis Hexapod
High Velocity, Medium Load, Affordable
H-824 6-Axis Hexapod
Low-Profile, Precision Parallel-Kinematic System
F-206.S HexAlign™ 6 Axis-Hexapod
Parallel-Kinematics Precision Alignment System / Manipulator, with Controller

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