- Semiconductor technology
- X-ray diffraction measurements
- Tool control
The M-824 is the ideal micropositioning system for all complex positioning tasks which depend on high speed and accuracy in six independent axes. In addition to positioning all axes, it allows the user to define a center of rotation (pivot point) anywhere inside or outside the system envelope by one simple software command.
Extremely Compact, Two Motor Versions
The M-824 uses a very compact drive with motor and spindle mounted side-by-side and, with a height of 188 mm, has a considerably lower profile than either the M-850 (see link) or M-840 (see link) Hexapods. Two versions featuring different drives are offered: the self-locking M-824.3DG with DC motor and gearhead can position loads of up to 5 kg in any orientation (10 kg with baseplate horizontal) with sub-micron precision. The M-824.3PD with integrated ActiveDrive™ system provides a significantly higher velocity of up to 25 mm/sec with loads up to 5 kg.
Hexapod vs. Serial Kinematics Systems
The Hexapod is driven by six high-resolution actuators all connected directly to the same moving platform. This design provides a high system stiffness and a large clear aperture.
Because of the low mass of the moving platform, positioning operations can be performed with far lower settling times than with conventional, stacked multi-axis systems. In such systems, runout, guiding errors, and the friction and inertia of moving cables all accumulate to limit accuracy and repeatability—problems which do not affect parallel kinematic systems like the Hexapod.
Fixed Virtual Pivot Point
For optics and other alignment tasks, it is important to be able to define a fixed pivot point. The sophisticated Hexapod controller allows choosing any point in space as the pivot point for the rotation axes by software command. The pivot point remains fixed relative to the platform. Target positions in 6-space are entered in user-friendly coordinates and reached by smooth vectorized motion.
Control of the hexapod is facilitated by the controller"s open interface architecture, which provides a variety of high-level commands and includes a macro language for programming and storing command sequences.
Both models are available as vacuum versions that enable use in applications such as X-ray diffraction microscopy with ambient pressures down to 10-6 hPa.