- Semiconductor technology
- X-ray diffraction measurements
- Tool control
With a platform diameter of only 10 cm the M-810 Hexapod is the most compact parallel-kinematics micropositioning system to date. In addition to positioning all six axes with high speed and accuracy, it allows the user to define the center of rotation (pivot point) anywhere inside or outside the system envelope by one simple software command. This makes it ideal for all complex positioning tasks with restricted space.
Extremely Compact, Great Freedom of Motion
The M-810.00 with its direct-drive torque motors and ActiveDrive system with integrated servo ampifiers provides an increased velocity of up to 2.5 mm/s for loads up to 5 kg. Small and compact, the Hexapod allows a large stroke of up to 40 mm (linear) and 60° (angular).
Hexapod vs. Serial Kinematics Systems
The Hexapod is driven by six high-resolution actuators all connected directly to the same moving platform. This design provides a high system stiffness and a large clear aperture.
Because of the low mass of the moving platform, positioning operations can be performed with far lower settling times than with conventional, stacked multi-axis systems. In such systems, runout, guiding errors, and the friction and inertia of moving cables all accumulate to limit accuracy and repeatability-problems which do not affect parallel kinematic systems like the Hexapod.
User-Defined Pivot Point
For optics and other alignment tasks, it is important to be able to define a fixed pivot point.
The sophisticated Hexapodcontroller allows choosing any point in space as the pivot point for the rotation axes with a simple software command. The pivot point remains fixed relative to the platform.
Target positions in 6-space are entered in user-friendly coordinates and reached by smooth vectorized motion.
Control of the Hexapod is facilitated by the controller's open interface architecture, which provides a variety of high-level commands and includes a macro language for programming and storing command sequences.