M-880 3-Axis Planar Precision Positioning System
XY-Rot-Z Parallel Kinematics System with Very High Holding Force
M-880.PD for planar load positioning up to 20 kg with sub-micron accuracy
M-880.PD for planar load positioning up to 20 kg with sub-micron accuracy
  • Travel Ranges 20 x 20 mm / 8°
  • Static Load Capacity to 150 kg
  • ActiveDrive Servo Motors
  • Low Profile through Parallel Kinematics
  • Min. Incremental Motion to 0.75 µm
  • Large Clear Aperture
  • Sophisticated Controller Included
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