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- R&D
- Semiconductor testing
- Mass storage device testing
- Metrology
- Photonics packaging
- Quality assurance testing
- Precision Linear Motion Control
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M-5x1-series translation stages are designed to meet the most demanding positioning requirements and are available in a number of different models. They boast an extremely low profile design to allow multiaxis combinations (see also link and link) and feature a precision-machined base of high-density, stress-relieved aluminum for exceptional stability and minimum weight.
Heavy Duty and Maintenance Free
The stages are equipped with high-precision linear guiding rails with recirculating ball bearings to guarantee 1 µm/100 mm straightness and flatness. Precision-ground recirculating ball screws with preloaded nuts provide low-friction, maintenance-free and backlash-free positioning. This equipment provides high load capacity and guiding accuracy with long lifetime.
our Drive Options
Maximum dynamic performance is possible with versions featuring the highly efficient ActiveDrive™ direct-drive system, which can achieve speeds of up to 125 mm/s.
The ActiveDrive™ design, de-veloped by PI, features a high-efficiency PWM (pulse width modulation) servo-amplifier mounted side-by-side with the DC motor and offers several advantages:
- Increased efficiency, by eliminating power losses between the amplifier and motor
- Reduced cost of ownership and improved reliability, because no external driver is required
- Elimination of PWM amplifier noise radiation, by mounting the amplifier and motor together in a single, electrically shielded case
The M-5x1.PD version provides velocities up to 125 mm/sec. It is equipped with an ActiveDrive™ DC motor and rotary encoder.
The M-5x1.DD models provide superior repeatability of only 0.2 µm by means of integrated optical linear encoders. A motor brake which assures maintenance of the stage position after power-down is also available. The M-5x1.DG versions feature closed-loop DC motors with shaft-mounted position encoders and precision gearheads providing minimum incremental motion to 0.1 µm with velocities up to 6 mm/s.
The M-5x1.2S versions models feature a cost-effective direct-drive, 2-phase stepper motor, providing very smooth operation and a resolution of 0.1 µm.
Precision Assembly
The stages are individually tested and optimized using a laser interferometer.
Notes
For adapters, bracket, etc. (see link ff).
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PDF Catalog Datasheet
