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- R&D
- Semiconductor testing
- Mass storage device testing
- Metrology
- Photonics packaging
- Quality assurance testing
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The M-501 Z-stage is the latest family member of the M-500 series of translation stages. It is ideal for forming compact XYZ combinations together with the low-profile M-511, M-521 and M-531 translation stages. M-501 vertical stages feature a precision-machined base of high-density, stress-relieved aluminum for exceptional stability and minimum weight. Precision-ground recirculating ball screws with preloaded nuts provide low-friction, maintenance-free and backlash-free positioning.
Two DC-motor drives are currently available:
M-501.1PD with ActiveDrive™ for High Velocity
This model features an ultra-high-resolution ballscrew-mounted encoder (40 960 counts/rev!) and provides a minimum incremental motion of better than 100 nanometers (design resolution 24 nm).
For superior dynamic performance the ActiveDrive™ motor is integrated. The ActiveDrive™ design, developed by PI, features a high-efficiency PWM (pulse width modulation) servo-amplifier mounted side-by-side with the DC motor and offers several advantages:
- Increased efficiency, by eliminating power losses between the amplifier and motor
- Reduced cost of ownership and improved reliability because no external driver is required
- Elimination of PWM amplifier noise radiation, by mounting the amplifier and motor together in a single, electrically shielded case
M-501.1DG with Gearhead
These versions feature closed-loop DC motors with shaft-mounted position encoders and precision gearheads providing a minimum incremental motion to 0.1 µm and 5 nanometer encoder resolution.
The gearhead version can hold loads to 10 kg in power-off mode.
Limit and Reference Switches
For the protection of your equipment, non-contact Hall-effect limit and reference switches are installed. The direction-sensing reference switch supports advanced automation applications with high precision.
Notes
For adapters, bracket, etc. (see link).
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PDF Catalog Datasheet
