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Piezo Actuators (PZTs)
Nanopositioning & Scanning Systems
Fast Steering Mirrors/
Active Optics
Nanometrology Sensors
Features & Advantages, Applications
Specifications: D-015, D-050, D-100 Standard Sensors
Design & Characteristics of PI Sensors
Piezo Drivers & Nanopositioning Controllers
Micropositioning/
Hexapods
Photonics Alignment Solutions
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Piezo Linear Motors & Stages

Piezo-University
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D-015 · D-050 · D-100 Capacitive Sensors
Sub-Nanometer-Resolution Position Sensors
Fig. 1. D-015, D-050, D-100 ultra-high-resolution capacitive position sensors provide up to 10,000 times higher resolution than calipers
Fig. 1. D-015, D-050, D-100 ultra-high-resolution capacitive position sensors provide up to 10,000 times higher resolution than calipers
  • For Applications Requiring Highest Precision
  • Measuring Range to 1000 microns
  • Resolution to 0.01 nm
  • Linearization to 0.01% with Digital Controller
  • Bandwidth up to 10 kHz
  • Servo Controller E-509.CxA, Compatible with E-500 Controller System
  • Custom Designs
Fig. 2. Piezo nanopositioning system making 0.3 nm steps, measured with PI capacitive sensor (lower curve) and with a highly precise laser interferometer. The capacitive sensor provides significantly higher resolution than the interferometer.
 
Description Specifications Downloads CAD/Video
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Technical Data
ModelD-015.00D-050.00D-100.00Units
Sensor
Sensor typCapacitiveCapacitiveCapacitive
Nominal measurement range1550100µm
Extended measurement range45150300µm
Resolution*0.00050.00050.0005% of measurement range
Linearity**0.010.010.01%
Sensor active area16.656.5113.1mm2
Thermal drift***505050ppm/K
Miscellaneous
Operating temperature range-20 bis 80-20 bis 80-20 bis 80°C
MaterialAluminumAluminumAluminum
Recommended sensor electronicsE-509.CxAE-509.CxAE-509.CxA (see link)
Ask for custom materials
*3 kHz, with E-509.C3A servo controller
**With digital controller. Up to 0,05% typ. with E-509 analog controller
***Change of active surface size in ppm (parts per million), refers to measurement range