Technical Data
| Model | M-511.HD |
|---|
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| Active axes | X |
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| Motion and positioning | |
|
| Travel range | 100 mm |
|
| Integrated sensor | Linear encoder |
|
| Sensor resolution | 0.002 µm |
|
| Design resolution | 0.002 µm |
|
| Min. incremental motion | 0.004 µm |
|
| Hysteresis at the platform | 0.01 µm |
|
| Unidirectional repeatability | 0.01 µm |
|
| Accuracy | <0.05 µm |
|
| Pitch | ±25 µrad |
|
| Yaw | ±25 µrad |
|
| Straightness | 1 µm |
|
| Flatness | 1 µm |
|
| Max. velocity | 50 mm/s |
|
| Origin repeatability | 1 µm |
|
| Mechanical properties | |
|
| Drive screw | Recirculating ballscrews |
|
| Guiding | Precision linear guiding rails, recirculating ball bearings |
|
| Screw pitch | 2 mm/rev. |
|
| Max. load | 200 N |
|
| Max. push/pull force | 80/80 N |
|
| Max. lateral force | 200 N |
|
| Drive properties | |
|
| Drive type | Hybrid drive: DC motor with low-inertia, flexure-decoupled and piezo actuated stage platform |
|
| Motor type | DC motor |
|
| Operating voltage (motor) | 24 V |
|
| Electrical power | 30 W |
|
| Piezo drive type | PICMA® Multilayer piezo with flexure |
|
| Piezo voltage | ±36 V |
|
| Limit and reference switches | Hall-effect |
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| Miscellaneous | |
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| Operating temperature range | -20 to +65 °C |
|
| Material | Al (black anodized) |
|
| Mass | 5.1 kg |
|
| Recommended controller/driver | C-702 hybrid motor controller (see link) |
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