Technical Data
| M-714.2HD |
|---|
|
| Motion and positioning | |
|
| Travel range | 7 mm |
|
| Integrated sensor | Linear encoder |
|
| Sensor resolution | 0.002 µm |
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| Design resolution | 0.002 µm |
|
| Min. incremental motion | 0.004 µm |
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| Hysteresis at the platform | 0.01 µm |
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| Unidirectional repeatability | 0.01 µm |
|
| Accuracy | <0.05 µm |
|
| Pitch | ±10 µrad |
|
| Yaw | ±10 µrad |
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| Max. velocity | 0.2 mm/s |
|
| Origin repeatability | 1 µm |
|
| Mechanical properties | |
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| Drive screw | Leadscrew |
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| Guiding | Crossed-roller bearings |
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| Screw pitch | 1 mm/rev. |
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| Gear ratio | 80:1 |
|
| Belt drive transmission ratio | 3:1 |
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| Max. push/pull force | 100/100 N |
|
| Self inhibition | 100 N |
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| Max. lateral force | 200 N |
|
| Drive properties | |
|
| Drive type | Hybrid drive: DC-motor with low-inertia, flexure-decoupled and piezo actuated stage platform |
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| Motor type | DC-motor, gearhead |
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| Operating voltage (motor) | 24 V |
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| Electrical power | 13 W |
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| Piezo drive type | PICMA® Multilayer piezo with flexure |
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| Piezo voltage | ±36 V |
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| Limit and reference switches | Hall-effect |
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| Miscellaneous | |
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| Operating temperature range | -20 °C to +65 °C |
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| Material | Al (black anodized) |
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| Mass | 2.1 kg |
|
| Recommended controller/driver | C-702 hybrid motor controller (see link) |
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