Technical Data
| Model | F-206.S0 / F-206.SD |
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| Travel range X* | -8 to +5.7 mm |
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| Travel range Y* | ±5.7 mm |
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| Travel range Z* | ±6.7 mm |
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| Travel range qX * | ±5.7° |
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| Travel range qY * | ±6.6° |
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| Travel range qZ * | ±5.5° |
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| Actuator resolution | 33 nm |
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| Minimum incremental motion X, Y, Z** | 0.1 µm (6-axis move!) |
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| Minimum incremental motion qX, qY, qZ** | 2 µrad (0,4“) (6-axis move!) |
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| Bidirectional repeatability X, Y, Z | 0.3 µm |
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| Bidirectional repeatability qX, qY, qZ | 3.6 µrad |
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| Speed X, Y, Z | 0.01 to 10 mm/s |
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| Maximum load in Z | 2 kg (centered on platform) |
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| Mass | 5.8 kg |
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| Controller | Digital Hexapod controller with optional photometer card and integrated scan and align routines |
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| Operating voltage | 100-240 VAC, 50/60 Hz |
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| Software | LabView™ drivers, software for alignment of arrays, DLL libraries, HexControl™, scan and align software, terminal software |
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*Travel ranges in the coordinate directions (X, Y, Z, qX, qY, qZ) are interdependent. The data given shows maximum travel range of the axis in question (i.e. its travel when all other axes are at their zero positions).
If this is not the case, the available travel may be less.
**Six-axis move. No moving cables (unlike serial-kinematic stacked systems) to introduce bending forces, torque and friction which degrade positioning accuracy.
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