Technical Data
| Models | F-110.00 | Units |
|---|
|
| Axes | X, Y, Z | |
|
| Travel range (manual) | 18 | mm |
|
| Piezo fine-travel range | 50 | µm |
|
| Resolution (piezoelectric) | 0.5 | nm |
|
| Resolution (micrometer drive) | 1 | µm |
|
| Max. load (Z-axis) | 20 | N |
|
| Mechanical positioning system | M-105.30, see link | |
|
| Piezoelectric positioning system | P-282.20, see link | |
|
| Weight | 1.1 | kg |
|
| Recommended amplifier/controller | E-463, E-500 w/ 3 x E-507 | |
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