P -733.3 DD (left) and P -733.2 DD, high-speed, direct drive XY(Z) scanning stages are the fastest scanning stages with large aperture currently available (2.2 kHz resonant frequency!). Both units feature a footprint of only 100 x 100 mm. CD for size comparison. |
- Travel Ranges to 100 x 100 µm in X,Y & to 10 µm in Z
- Resolution to 0.1 nm with Capacitive Sensors
- High-Speed Versions with Direct Drive
- Vacuum and Non-Magnetic Versions
- Parallel Kinematics for Better Multi-Axis Accuracy and Dynamics
- Parallel Metrology for Active Trajectory Control
- Frictionless, High-Precision Flexure Guiding System
- Clear Aperture 50 x 50 mm for Transmitted-Light Applications
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