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D-015 · D-050 · D-100 Capacitive Sensors
Sub-Nanometer-Resolution Position Sensors
Fig. 1. D-015, D-050, D-100 ultra-high-resolution capacitive position sensors provide up to 10,000 times higher resolution than calipers
Fig. 1. D-015, D-050, D-100 ultra-high-resolution capacitive position sensors provide up to 10,000 times higher resolution than calipers
  • For Applications Requiring Highest Precision
  • Measuring Range to 1000 microns
  • Resolution to 0.01 nm
  • Linearization to 0.01% with Digital Controller
  • Bandwidth up to 10 kHz
  • Servo Controller E-509.CxA, Compatible with E-500 Controller System
  • Custom Designs
Fig. 2. Piezo nanopositioning system making 0.3 nm steps, measured with PI capacitive sensor (lower curve) and with a highly precise laser interferometer. The capacitive sensor provides significantly higher resolution than the interferometer.
 
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D-015.00
Capacitive Position Sensor, 15 µm, Aluminum

D-050.00
Capacitive Position Sensor, 50 µm, Aluminum

D-100.00
Capacitive Position Sensor, 100 µm, Aluminum

Ask about custom designs!
Related Information:
 
D-510 PISeca Capacitive Sensors
Single-Plate Sensors with Excellent Position Resolution
 
E-509 Signal Conditioner / Piezo Servo Module
3-Channel Servo-Controller Module for E-500 Piezo Controller System