Shopping Basket



Latest PI Newsletter
Fast Low Profile Piezomotor Rotary Stage
High Force Ceramic Linear Motor
24 Bit Piezo Controllers with USB
Ultra-High Dynamics Objective Scanner
PI Nano Microscope Stage
New Vacuum Compatible Products
Miniature Hexapod
Scanning Microscopy Stage
D-015 · D-050 · D-100 Capacitive Sensors
Sub-Nanometer-Resolution Position Sensors
Fig. 1. D-015, D-050, D-100 ultra-high-resolution capacitive position sensors provide up to 10,000 times higher resolution than calipers
Fig. 1. D-015, D-050, D-100 ultra-high-resolution capacitive position sensors provide up to 10,000 times higher resolution than calipers
  • For Applications Requiring Highest Precision
  • Measuring Range to 1000 microns
  • Resolution to 0.01 nm
  • Linearization to 0.01% with Digital Controller
  • Bandwidth up to 10 kHz
  • Servo Controller E-509.CxA, Compatible with E-500 Controller System
  • Custom Designs
Fig. 2. Piezo nanopositioning system making 0.3 nm steps, measured with PI capacitive sensor (lower curve) and with a highly precise laser interferometer. The capacitive sensor provides significantly higher resolution than the interferometer.
 
Description   Specifications   Downloads   CAD/Video
Drawings & Images   Models/Get Price Quote   Related Info   ?? Questions ??
 
Similar Products / Related Products / Accessories
Click on the Image for further Information
 D-510 PISeca Capacitive Sensors Single-Plate Sensors with Excellent Position Resolution
PISeca high-precision capacitive sensor probes with E-852 signal conditioner electronics. Sensor probes (from left): D-510.101 with 100 µm, D-510.051 with 50 µm, D-510.021 with 20 µm nominal measurement range
PISeca high-precision capacitive sensor probes with E-852 signal conditioner electronics. Sensor probes (from left): D-510.101 with 100 µm, D-510.051 with 50 µm, D-510.021 with 20 µm nominal measurement range
  • Non-Contact Measurement for Distance / Motion / Vibration
  • Absolute Position Sensing
  • Sub-Nanometer Resolution
  • Measurement Ranges to 500 µm
  • Easy Integration
  • High Bandwidth
 
 E-509 Signal Conditioner / Piezo Servo Module 3-Channel Servo-Controller Module for E-500 Piezo Controller System
E-509 3-channel servo-controller module for nanopositioning systems with strain gauge sensors
E-509 3-channel servo-controller module for nanopositioning systems with strain gauge sensors
  • Position Servo-Control for Piezo Mechanics with SGS or Capacitive Sensors
  • 1-, 2- and 3-Channel Versions
  • Improves Linearity
  • Eliminates Drift and Hysteresis
  • Notch Filter for Higher Bandwidth
  • Increases Piezo Stiffness
  • ILS Circuitry Maximizes Capacitive Sensor Linearity
  • Plug-In Module for E-500 System
  • Prepared for Interfaces / Display Modules (optional)