 M-605 High-Accuracy Translation Stage Ultra-Compact, with Direct Position Measurement |
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M-605.2DD high precision translation stage |
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- Integrated 0.1 µm Linear Encoder for Highest Accuracy
- Travel Ranges 25 mm (1") and 50 mm (2")
- Max. Velocity 50 mm/s with ActiveDrive Motor
- High Load Capacity up to 30 kg
- Zero-Backlash Recirculating Ballscrews
- Non-contact Limit and Reference Switches
- Stress-Relieved Aluminum Base for Highest Stability
- Flexible Bellows Protects the Mechanics from Dust and Spray
- XY & XYZ Combinations Possible
- MTBF >20,000 h
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| M-511 · M-521 · M-531 Heavy-Duty Micropositioning Stage High-Precision Linear Guiding, Long Travel, Direct Position Measurement |
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M-531.DD, M-521.DD, M-511.DD and M-505.2DG heavy duty translation stages with recirculating ballscrew drive (bottom to top) |
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- Travel Ranges 102, 204 and 306 mm (4", 8", 12")
- Max. Velocity 125 mm/s with ActiveDrive(tm) Motors
- Optional 0.1 µm Linear Encoder for Highest Accuracy
- Load Capacity of 100 kg
- Stress-Relieved Aluminum Base for Highest Stability
- Zero-Backlash Recirculating Ballscrews
- Non-contact Limit and Reference Switches
- XY & XYZ Combinations (Special Z-Stages Available)
- MTBF >20,000 h
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| M-714 Nanometer-Precision Linear Stage Heavy-Duty Precision Hybrid DC/Piezo Drive with High Guiding-Accuracy |
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Hybrid Z-positioner M-714.HD |
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- Simultaneous Control of Piezo-Flexure Drives & DC-Servo/Ballscrew Drives
- 7 mm Vertical Travel Range, 10 kg Load Capacity
- High Holding Forces with Minimum Power Consumption
- Integrated Precision Linear Encoder Provides 2 nm Resolution
- Active Backlash Compensation and Stick/Slip Compensation
- Frictionless Piezo Drive and Flexure-Decoupled Ballscrew
- Millisecond Settling Time to Nanometer Precision
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| M-501 Precision Vertical Stage Compact XYZ Combinations with M-511 Translation Stage Series |
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M-501.1PD vertical stage |
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- Travel Range 12.5 mm (1/2")
- Ultra-High-Resolution Encoder
- ActiveDrive™ Motor
- Zero-Backlash Recirculating Ballscrews
- Non-Contact Limit and Reference Switches
- Stress-Relieved Aluminum Base for Highest Stability
- MTBF >20,000 h
- Self Locking to 10 kg
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| M-451 High-Load Precision Z-Stage Combinations with Piezo-Nanopositioning Stages Possible |
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M-451.1PD precision elevation stage |
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- Encoder Resolution 3 Nanometer
- Min. Incremental Motion to 100 nm
- Travel Range 12.5 mm (1/2")
- Load Capacity up to 12 kg, High Stiffness
- ActiveDrive™ Motor
- Non-contact Limit and Reference Switches
- Mounting Platform for P-500 and PIMars™ Piezo- Nanopositioning Systems
- Self-Locking
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| C-702 Hybrid System Controller High Velocity-Constancy for Nanometer-Precision Hybrid DC/Piezo Nanopositioning Systems |
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C-702 Hybrid Controller |
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- Motion Controller & Driver for Simultaneous Operation of Closed-Loop DC Servo Motors and Piezo Actuators
- 2 Channels
- Sample Rate 10 kHz
- Piezo Resolution 24-bit
- Fast Serial Bus for Incremental High-Resolution Sensor
- Realtime Operating System
- Interfaces: TCP/IP Ethernet, RS-232, VGA, Keyboard
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