P-611.3 NanoCube® XYZ Piezo Stage
Compact Multi-Axis Piezo System for Nanopositioning and Fiber Alignment
NanoCube® XYZ-nanopositioning system, 100 x 100 x 100 µm closed-loop travel range, resolution 1 nm
NanoCube® XYZ-nanopositioning system, 100 x 100 x 100 µm closed-loop travel range, resolution 1 nm
  • Up to 120 x 120 x 120 µm Travel Range
  • Very Compact: 44 x 44 x 44 mm
  • Resolution to 0.2 nm, Rapid Response
  • Frictionless, High-Precision Flexure Guiding System
  • Outstanding Lifetime Due to PICMA® Piezo Actuators
  • Fast Multi-Axis Scanning
  • Version with Integrated Fiber Adapter Interface
  • Cost-Effective Mechanics/Electronics System Configurations
P-611.3 dimensions in mm
 
Description   Specifications   Downloads   CAD/Video
Drawings & Images   Models/Get Price Quote   Related Info   ?? Ask an Engineer
Technical Data
ModelP-611.3S, P-611.3SFP-611.3O, P-611.3OFUnitsTolerance
Active axesX, Y, ZX, Y, Z
Motion and positioning
Integrated sensorSGS
Open-loop travel, -20 to +120 V120 / axis120 / axisµmmin. (+20%/0%)
Closed-loop travel100 / axis-µm
Open-loop resolution0.20.2nmtyp.
Closed-loop resolution1-nmtyp.
Linearity0.1-%typ.
Repeatability<10-nmtyp.
Pitch in X,Y±5±5µradtyp.
Runout qX (Z motion)±10±10µradtyp.
Yaw in X±20±20µradtyp.
Yaw in Y±10±10µradtyp.
Runout qY (Z motion)±10±10µradtyp.
Mechanical properties
Stiffness 0.30.3N/µm±20%
Unloaded resonant frequency X / Y / Z350 / 220 / 250350 / 220 / 250Hz±20%
Resonant frequency @ 30 g X / Y / Z270 / 185 / 230270 / 185 / 230Hz±20%
Resonant frequency @ 100 g X / Y / Z180 / 135 / 200180 / 135 / 200Hz±20%
Push/pull force capacity in motion direction+15 / -10+15 / -10NMax.
Load capacity1515NMax.
Drive properties
ceramic typePICMA® P-885PICMA® P-885
Electrical capacitance 1.51.5µF±20%
Dynamic operating current coefficient 1.91.9µA/(Hz • µm)±20%
Miscellaneous
Operating temperature range-20 to 80-20 to 80°C
MaterialAluminum, steel Aluminum, steel
Dimensions44 x 44 x 43.2, SF-version:44 x 50 x 44.244 x 44 x 43.2, OF-version: 44 x 50 x 44.2mm
Mass0.320.32kg±5%
Cable length1.51.5m±10 mm
Sensor connectorSub-D -
Voltage connectionSub-DSub-D
Recommended controller / amplifierE-664 Nanocube® Controller (see link)3 x E-610.00F OEM amplifier modules (see link); E-663 3-channel amplifier, bench-top (see link)


Resolution of PI Piezo Nanopositioners is not limited by friction or stiction. Value given is noise equivalent motion with E-503 amplifier (see link)
Dynamic Operating Current Coefficient in µA per Hz and µm. Example: Sinusoidal scan of 50 µm at 10 Hz requires approximately 0.8 mA drive current.
Adapter cable with LEMO connectors for sensor and operating voltage available.
Application Articles, Background Information, External Links