Technical Data
| Model | P-611.3S, P-611.3SF | P-611.3O, P-611.3OF | Units | Tolerance |
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| Active axes | X, Y, Z | X, Y, Z | | |
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| Motion and positioning | | | | |
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| Integrated sensor | SGS | | | |
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| Open-loop travel, -20 to +120 V | 120 / axis | 120 / axis | µm | min. (+20%/0%) |
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| Closed-loop travel | 100 / axis | - | µm | |
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| Open-loop resolution | 0.2 | 0.2 | nm | typ. |
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| Closed-loop resolution | 1 | - | nm | typ. |
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| Linearity | 0.1 | - | % | typ. |
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| Repeatability | <10 | - | nm | typ. |
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| Pitch in X,Y | ±5 | ±5 | µrad | typ. |
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| Runout qX (Z motion) | ±10 | ±10 | µrad | typ. |
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| Yaw in X | ±20 | ±20 | µrad | typ. |
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| Yaw in Y | ±10 | ±10 | µrad | typ. |
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| Runout qY (Z motion) | ±10 | ±10 | µrad | typ. |
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| Mechanical properties | | | | |
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| Stiffness | 0.3 | 0.3 | N/µm | ±20% |
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| Unloaded resonant frequency X / Y / Z | 350 / 220 / 250 | 350 / 220 / 250 | Hz | ±20% |
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| Resonant frequency @ 30 g X / Y / Z | 270 / 185 / 230 | 270 / 185 / 230 | Hz | ±20% |
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| Resonant frequency @ 100 g X / Y / Z | 180 / 135 / 200 | 180 / 135 / 200 | Hz | ±20% |
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| Push/pull force capacity in motion direction | +15 / -10 | +15 / -10 | N | Max. |
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| Load capacity | 15 | 15 | N | Max. |
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| Drive properties | | | | |
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| ceramic type | PICMA® P-885 | PICMA® P-885 | | |
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| Electrical capacitance | 1.5 | 1.5 | µF | ±20% |
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| Dynamic operating current coefficient | 1.9 | 1.9 | µA/(Hz µm) | ±20% |
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| Miscellaneous | | | | |
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| Operating temperature range | -20 to 80 | -20 to 80 | °C | |
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| Material | Aluminum, steel | Aluminum, steel | | |
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| Dimensions | 44 x 44 x 43.2, SF-version: | 44 x 50 x 44.2 | 44 x 44 x 43.2, OF-version: 44 x 50 x 44.2 | mm | |
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| Mass | 0.32 | 0.32 | kg | ±5% |
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| Cable length | 1.5 | 1.5 | m | ±10 mm |
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| Sensor connector | Sub-D | - | | |
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| Voltage connection | Sub-D | Sub-D | | |
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| Recommended controller / amplifier | E-664 Nanocube® Controller (see link) | 3 x E-610.00F OEM amplifier modules (see link); E-663 3-channel amplifier, bench-top (see link) | | |
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Resolution of PI Piezo Nanopositioners is not limited by friction or stiction. Value given is noise equivalent motion with E-503 amplifier (see link)
Dynamic Operating Current Coefficient in µA per Hz and µm. Example: Sinusoidal scan of 50 µm at 10 Hz requires approximately 0.8 mA drive current.
Adapter cable with LEMO connectors for sensor and operating voltage available.
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