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E-509 Signal Conditioner / Piezo Servo Module
3-Channel Servo-Controller Module for E-500 Piezo Controller System
E-509 3-channel servo-controller module for nanopositioning systems with strain gauge sensors
E-509 3-channel servo-controller module for nanopositioning systems with strain gauge sensors
  • 1-, 2- and 3-Channel Versions
  • Improves Linearity
  • Eliminates Drift and Hysteresis
  • Notch Filter for Higher Bandwidth
  • Increases Piezo Stiffness
  • ILS Circuitry Maximizes Capacitive Sensor Linearity
  • Plug-In Module for E-500 System
  • Prepared for Interfaces / Display Modules (optional)
The E-509 controller module installed in an E-501 9-inch chassis together with E-516 digital interface and E-503 three-channel amplifier modules
 
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Technical Data
ModelE-509.C1A/E-509.C2A/E-509.C3A E-509.S1/E-509.S3
FunctionSignal conditioner & servo-controller for piezo mechanicsSignal conditioner & servo-controller for piezo mechanics
Channels1/2/31/3
Sensor
Servo characteristicsP-I (analog), notch filterP-I (analog), notch filter
Sensor typeCapacitiveSGS
Sensor channels1 / 2 /31 / 3
Sensor bandwidth0.3 to 3 kHz (selectable with jumper); 0.3; 1; 3 kHz up to 10 kHz on request
Noise factor0.115 ppm/Hz
Thermal drift<0.3 mV / C°<3 mV / C°
Linearity<0.05%<0.2%
Interfaces and operation
Sensor connectionLEMO EPL.00.250.NTDLEMO ERA.0S.304.CLL
Sensor monitor output 0-10 V0-10 V
Sensor monitor socketLEMO 6-pin FGG.0B.306.CLAD56BNC (1-ch.) / 3-pin. LEMO (3-ch.)
Supported functionalityILS (Integrated Linearization System)ILS (Integrated Linearization System)
DisplayOverflow LEDOverflow LED
Miscellaneous
Operating temperature range+5 to +50 °C+5 to +50 °C
Dimensions7HP/3U7HP/3U
Mass0.35 kg0.35 kg
Operating VoltageE-500 SystemE-500 System
Max. power consumption 4 to 8 W4 to 8 W