M-850K Vacuum Hexapod 6-Axis Positioner
Parallel-Kinematics System for Wide Temperature Ranges
This custom hexapod was designed to work in a thermo-vacuum chamber
This custom hexapod was designed to work in a thermo-vacuum chamber
  • 6 Degrees of Freedom, Works in Any Orientation
  • Vacuum Compatible up to 10-6 hPa
  • 200 kg Load Capacity (Vertical)
  • Repeatability to ±1 µm
  • Encoder Resolution to 5 nm
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ModelOperating temperaturerangeStorage temperatureTravel rangesDimensions
M-850KTVH Vacuum Hexapod-10 bis +25 °C -20 bis +40 °C ±50 mm (X,Y), ±25 mm (Z), ±15° (qX, qY), ±30° (qZ)Æ 350 mm, 330 mm height


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