Technical Data
| Model | M-041.00 | M-042.00 | M-043.00 | M-044.00 | M-041.D01 | M-042.D01 | M-043.D01 | M-044.D01 | Units |
|---|
|
| Tilt axes | qX | qXqY | qX | qXqY | qX | qXqY | qX | qXqY | |
|
| Tilt range | ±9 | ±9 | ±7 | ±7 | ±9 | ±9 | ±7 | ±7 | ° (axis) |
|
| Fine range (piezo option) | ±1.2 | ±0.6 | ±1.4 | ±1.4 | ±1.2 | ±0.6 | ±1.4 | ±1.4 | mrad (axis) |
|
| Design resolution | - | - | - | - | 0.28 | 0.28 | 0.23 | 0.23 | µrad |
|
| Min. incremental motion | 80 | 80 | 65 | 65 | 5 | 5 | 5 | 5 | µrad |
|
| Min. incremental motion (piezo option) | 0.5 | 0.5 | 0.5 | 0.5 | 0.5 | 0.5 | 0.5 | 0.5 | µrad |
|
| Rotation / linear input | 80 | 80 | 65 | 65 | 80 | 80 | 65 | 65 | µrad/µm |
|
| Unidirectional repeatability | - | - | - | - | 20 | 20 | 15 | 15 | µrad |
|
| Backlash | - | - | - | - | 200 | 200 | 175 | 175 | µrad |
|
| Max. velocity (motor) | - | - | - | - | 4.5 | 4.5 | 3.6 | 3.6 | °/s |
|
| Max. load (A) | 4 | 4 | 5 | 5 | 4 | 4 | 5 | 5 | kg |
|
| Max torque (B, C) | 450, 150 | 450, 150 | 750, 250 | 750, 250 | 450, 150 | 450, 150 | 750, 250 | 750, 250 | mNm |
|
| Drive | M-622 Micrometer | M-622 Micrometer | M-624 Micrometer | M-624 Micrometer | M-227.10 DC-Mike | M-227.10 DC-Mike | M-227.10 DC-Mike | M-227.10 DC-Mike |
|
| Piezo drive (optional) M-04x.U0 / M-04x.US | P-840.20 / P-841.20 | P-840.10 / P-841.10 | P-840.30 / P-841.30 | P-840.30 / P-841.30 | P-840.20 / P-841.20 | P-840.10 / P-841.10 | P-840.30 / P-841.30 | P-840.30 / P-841.30 |
|
| Mass | 0.4 | 0.6 | 0.8 | 1.2 | 0.5 | 0.7 | 0.9 | 1.5 | kg |
|
| Body material | Al | Al | Al | Al | Al | Al | Al | Al | |
|
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