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Fast Steering Mirrors / Active Optics: Features & Advantages, Applications

Back to Introduction
Standard Products Selection Guide
Examples of Custom Designs
Reasons for Choosing PI

Active Optics
Tip/Tilt Mirrors/Scanners, Beam Steering
PI offers a wide range of ultra-fast piezo-driven steering mirrors / platforms and scanners.

These systems can perform optical beam steering over ranges of up to 100 mrad, have extremely low response times (milliseconds to microseconds) and resolutions in the nanoradian range. They are ideal for dynamic operation (e.g. tracking, scanning, drift and vibration cancellation) as well as static positioning of optics and samples.

Typical Applications in Active Optics
  • Mass storage device testing and manufacture (CD, DVD mastering)
  • Fast beam steering, alignment, switching
  • Interferometry, Fabry-Perot filters
  • Dynamic error correction (e.g. in polygon scanning mirrors)
  • Optical path length stabilization
  • Vibration cancellation (laser systems, imaging)
  • Image stabilization (astronomical telescopes, imaging)
  • Image resolution enhancement (pixel multiplication, dithering)
  • Laser beam stabilization (resonators, optical setups)
  • Laser beam scanning (lithography, optical setups)
  • Laser beam steering and tracking (telecommunication satellites, etc.)
  • Bore-sight systems
PI System Solutions
  • Standard, OEM and custom designs
  • One-, two- or three-axis systems with nanoradian/sub-nanometer resolution
  • Microsecond response time
  • Closed-loop operation for highest linearity and repeatability
  • Optional integrated capacitive position sensors for extremely high accuracy, stability and resolution
  • Optimized mechanical design, control algorithms and software for higher throughput
  • High-performance controllers and amplifiers (digital, analog, modular, OEM)
  • Patented feedforward techniques for rapid settling
  • Dynamic Digital Linearization (DDL) to eliminate tracking error
  • Finite Element Analysis (FEA) computer-designed flexures for ultra-precise trajectory control
  • Invar, titanium, steel and aluminum versions for optimized thermal match
  • Standard platforms accommodate optics to 100 mm in diameter
  • Custom designs for optics up to 300 mm diameter (astronomical telescopes)

S-334 long-range fast steering mirror


Basic design of a tripod 3-axis fast steering mirror active optics platform featuring three actuators and four sensors.

Reasons for Choosing PI
  • PI employs the most-experienced nanopositioning systems R&D and production teams
  • Large variety of standard and custom systems available
  • In-house PZT ceramics manufacture ensures high level of quality
  • PICMA® ceramic-encapsulated piezo drives improve reliability
  • Modern test, simulation and production equipment
  • In-house controller development
  • State-of-the-art metrology lab with 6-way isolaton (2 x thermal, 2 x seismic, acoustic and aerodynamic) for meaningful sub-nanometer measurements
  • In-house design & manufacture of high-resolution capacitive sensors (sub-nanometer accuracy)
  • Patented vibration-eliminating feedforward techniques for highest bandwidth
  • ISO-9001 certified since 1994

FEA analysis of a fast steering mirror platform shows nanometer-range deformation due to gravity.
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