Applications: PI Products for Metrology / Laser Systems / Optical Inspection / Tribology


PI precision positioning stages and actuators have been used in many noncontacting optical inspection and contacting nanometrology applications. They provide sub-nanometer precision and extremely uniform motion.

PI's capacitive nanometrology sensors measure motion down to the sub-nanometer range with very high bandwidth.

PI piezo-driven actuators and nanopositioning sensors are also ideal components for the design of nano-indentation / micro-indentation mechanisms.


Technical Papers
IBM Interferometric Metrology Tool for Data Storage and Semiconductors
Why Parallel Metrology Provides Higher Precision
Nanopositioning: Keeping Pace

Why PI Piezo Actuators Provide Superior Lifetime
Extreme Piezo Lifetime Test Report
Properties of PZT Multilayer Actuators
A Study on the Reliability of Piezoelectric Multilayer Actuators
Scanning Interferometry, White-Light Interferomtry
P-721
PIFOC® High-Speed Nanofocusing/Scanning Z-Drives with Direct Metrology
  • PIFOC® Objective Nanofocusing Systems
  • Piezo Scanning Stages
  • Z-Axis Piezo Phase Shifters
Measuring Nanometers: Stage Metrology Selection
PIFOC® Objective Scanner Systems... Image Faster
S-303 High-speed Piezoelectric Phase Shifters
1500 µm Travel XY-Version Added to PIHera® Family of Piezo Nanopositioning Stages
Introduction to Piezo Flexure Nanopositioners and Scanners
Scanning (Microscopy) Stages with Clear Aperture
Multi-Axis Stages, Parallel Kinematics / Parallel Metrology
Closed-Loop Single-Axis Stages with Direct Metrology
Fast Steering Mirror, Tip-Tilt Platform & Active Optics Selection Guides
P-587
6-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage
P-734
Ultra-Precision Trajectory, XY Nanopositioning Stages with Parallel Metrology
S-303
High-Speed Piezo Phase Shifters
P-620.Z
PIHera® Vertical Piezo Nanopositioning Stages
Precision Linear Positioning Stages for Surface Analysis, Optical Inspection, Laser Positioning Systems
M-714
Hybrid Piezo/DC-Motor Nanopositioning Z-Stage
  • Microscopy Stages with Piezo Option
  • Hybrid Long-Range Nanopositioning Stages
Hybrid Nanopositioning Technology by PI- Long Travel Ranges
     with Nanometer Precision

Translation Stages (DC-Servo, Stepper Motor, Manual)
Vertical Stages
M-511
Low-Profile, High-Load Translation Stages with Ballscrew Drives
M-014 Ultra-High-Precision, Side-Drive Stages with Magnetic-Kinematic Bearings
Long Range Surface Scanning
V-106
Long-Travel, High-Dynamics Scanning System
  • Voice-Coil Scanning Stages/Positioners


Nanomaterials Testing, Nanotribology, Nanothickness Measurements, Nanoindentation,
Contacting Surface Profilometer
D-100
Sub-Nanometer-Resolution Capacitive Position Sensors
  • Piezo Actuators
  • X, XY and XYZ Piezo Stages
  • Capacitive Sensors
Stability and Linearity of PI Capacitive Position Sensors
Tutorial: Piezoelectrics in Nanopositioning, Designing with Piezoelectric Actuators
Preloaded Piezo Stack Actuators for Medium Loads, with Position Sensor (optional)
Multi-Axis Stages, Parallel Kinematics / Parallel Metrology
Closed-Loop Single-Axis Stages with Direct Metrology
P-840
Preloaded Open- & Closed-Loop Piezo Translators (LVPZT)
P-561 PIMars™ XYZ Piezo Scanning- and Nanopositioning Stages with Parallel Metrology
P-734 Ultra-Precision Trajectory, XY Nanopositioning Stages with Parallel Metrology
P-753 LISA Piezo NanoAutomation® Stages / Actuators
Microscopy
See Examples Here

Autofocus Systems
P-541
Low-Profile Z- Piezo Nanopositioning Stages
  • PIFOC® Objective Nanofocusing Systems
  • Long-Travel Piezo Actuators
  • Z-Stages
PIFOC® Objective Scanner Systems... Image Faster
Microscopy Z-Stages / Objective Nanofocusing Systems
Preloaded High-load Piezo Stack Actuators, with Position Sensor (optional)
P-725
PIFOC® Long-Range, High-Speed Nanofocusing Z-Drives with Direct Metrology
P-239
Preloaded Open- & Closed-Loop Translators (HVPZT)
Ellipsometry
M-116
Micro Rotation Stages with Worm Gear Drive
  • Rotation Stages
M-116 Miniature Precision Rotation Stages
Rotation Stages
M-037
Rotation Stages with Worm Gear Drive
M-038
Rotation Stages with Worm Gear Drive
M-060
Series Rotation Stages with Worm Gear Drive
* Other standard or custom solutions from PI could be even more suitable for your application. Talk to a PI Applications Engineer.