Applications: PI Products for Nanotechnology, Nanofabrication, NanoAutomation®


Piezo positioning systems are fundamental tools for nanotechnology applications. Their extreme precision and speed makes them vital components in applications such as nanoimprint, nanoassembly, nano-data storage and nanofabrication.

In addition to extremely fast mechanics, PI also designs advanced digital piezo controllers that provide very high bandwidth and eliminate dynamic nonlinearity for vastly improved tracking accuracy. Active trajectory control eliminates off-axis errors and InputShaping® cancels self-generated vibration, for the fastest possible settling speeds.

The combination of advanced mechanical design and high-throughput control technology is called NanoAutomation®.


Applications & Technical Papers
3D Structuring in Nanotechnology with Piezo XYZ Stage and Lasers (Application by Nanoscribe)
IBM Interferometric Metrology Tool for Data Storage and Semiconductors Employs Custom PI Long-Range,
     Multi-Axis Piezo Nanopositioning Stage.

Piezoelectric Technology Eases Navigation in the Nanoworld.
Nanopositioning Stage Pulls Piconewtons in Molecular Stretching Application

Why PI Piezo Actuators Provide Superior Lifetime
Extreme Piezo Lifetime Test Report
Properties of PZT Multilayer Actuators
A Study on the Reliability of Piezoelectric Multilayer Actuators
Nanoimprint, Nanoassembly, Nanofabrication, Nanojoining, Nanomechanics, Nanomaterials Testing
P-733.3DD
Ultra-High-Speed, XY / XYZ Scanning Microscopy Stages with Parallel Metrology
  • Multi-Axis Nanopositioning Systems
  • PIHera® Stages Scanner
  • Preloaded Piezo Actuators
1000 µm Travel XY-Version Added to PIHera® Family of
     Piezo Nanopositioning Stages

Serial Kinematics vs. Parallel Kinematics
Multi-Axis Stages, Parallel Kinematics / Parallel Metrology
Closed-Loop Single-Axis Stages with Direct Metrology
Preloaded Piezo Stack Actuators for Medium Loads, with Position Sensor (optional)
P-563 PIMars XYZ Piezo Scanning- and Nanopositioning Stages with Parallel Metrology
P-587
6-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage
P-620.1 PIHera® Mini Long-Range Piezo Stages with Direct Metrology
P-840
Preloaded Open- & Closed-Loop Piezo Translators
Ultra-Precision Linear Motors & Actuators
N-310
Piezo Stepping Linear Lotor Actuator, Auto-Locking, Sub Nanometer Resolution
  • Motorized Precision Linear Actuators
NEXLINE® Nanopositioning Linear Motor for Semiconductor &
     Nanotechnology Applications

New Linear Ultrasonic Micromotor for Precision Mechatronic Systems
Nanometer Precise Hybrid Actuator in Positioning Mechanism with Long Travel Range.
PILine® Miniature Ultrasonic Motors
Piezo Linear Motors
Motorized Linear Actuators and Micrometers
PILine® Ultrasonic Piezo Linear Motors for OEMs
P-653
Ceramic Micro Linear Motor
M-674
PILine® RodDrive Integrated Piezo Linear Motor Drive
M-230
High-Resolution Closed-Loop DC-Mike & Stepper Actuators
M-235
Heavy-Duty High-Resolution Closed-Loop DC-Mike & Stepper Actuators
P-661
PILine® Piezomotors
Nanodosing, Microdispensing, Nanoliter Control, Fast Valve Control
PT120
Piezoceramic Tubes
  • Tube Actuators
  • Disk Actuators
  • Lever Amplified Actuators
  • Bender Actuators
Piezo Tube and Tubular Stack (Ring) Actuators
Bender Actuators / Bimorph Actuators
Closed-Loop Single-Axis Stages with Direct Metrology
Lever Amplified Piezo Z-Actuators
PL112
PICMA® Long-Travel Piezo Bender Actuators
P-286, P-288, P-289
Piezo Disk Translators
Microassembly and Handling Systems
F-206
HexAlign® 6-Axis Precision Alignment System / Manipulator
  • Hexapod 6D Micropositioning Robots
F-206.S Improved 6-Axis Micro-Hexapod System Now More Affordable
More on Hexapods...
Hexapods (6D Parallel Kinematics)
M-840
HexaLight 6-Axis-Parallel Kinematics Microrobot
M-850
Hexapod 6-Axis-Parallel Kinematics Microrobot
M-824
Compact 6-Axis Parallel Kinematics Microrobot
Precision Positioning of Components (Linear and Rotation)
M-110
High-Resolution Micro-Translation Stages
  • Miniature Stages
  • Rotation Stages
New Low-Cost Linear-Translation Stage Family Comes in 48 Variations
     from 25 to 300 mm

Translation Stages (DC-Servo, Stepper Motor, Manual)
Rotation Stages
Piezo Linear Motor Stages
M-663
PILine® MiniStages with Closed-Loop Ultrasonic Piezo Linear Motors
M-403
High-Resolution Leadscrew-Driven Translation Stages
M-511
Low-Profile, High-Load Translation Stages with Ballscrew Drives
M-038
Rotation Stages with Worm Gear Drive
M-060
Series Rotation Stages with Worm Gear Drive
Precision Actuation
M-230
High-Resolution Closed-Loop DC-Mike & Stepper Actuators
  • Motorized Precision Linear Actuators
M-238 Ultra-High-Load Precision Linear Actuators
PILine® Miniature Ultrasonic Motors
Linear Actuators and Micrometers
PILine® Ultrasonic Piezo Linear Motors for OEMs
M-235
Heavy-Duty High-Resolution Closed-Loop DC-Mike & Stepper Actuators
P-661
PILine® Piezomotors
M-674
PILine® RodDrive Integrated Piezo Linear Motor Drive
Microgrippers
P-286 Piezo Disk Translators
  • Piezo Disk Actuators
  • Bender Actuators
PI Wins Photonics Circle of Excellence Award during 2005 Photonics West
Piezoelectric Ceramics / Piezo Materials
PI Ceramic: Multilayer Bender Actuators
Bender Actuators / Bimorph Actuators
Piezo Ceramic Stacks (without cases): Multilayer (PICMA®), High-Force
     PICA-Actuators, Miniature PZT Actuators

P-885 PICMA®High-Performance Monolithic Multilayer Piezo Actuators
PL112
PICMA® Multilayer Piezo Bender Actuators
Microembossing
P-056 PICA-Stack Piezoceramic Actuators—Versatile Piezoelectric Power
  • Heavy-Duty Piezo Translators
PI Ceramic introduces PICA-Stack Piezoelectric Linear Actuators (PICA Stack)
Piezo Ceramic Stacks (without cases): Multilayer (PICMA®), High-Force
     PICA-Actuators, Miniature PZT Actuators

Preloaded Ultra High-load Piezo Stack Actuators, with Position Sensor (optional)
P-246, P-247
Preloaded High-Load Piezo Actuators with Sensor Option
* Other standard or custom solutions from PI could be even more suitable for your application. Talk to a PI Applications Engineer.