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| Nanoimprint, CD Testing, Mask and Wafer Alignment, Objective Precision Positioning, Lithography |
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N-216
NEXLINE® High-Load Piezo Nanopositioning Drive |
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- XYZ θx θy θz Piezo Nanopositioning Stages
- Piezo Actuators
- PIFOC® Nanofocusing Devices
 NEXLINE® Nano Drives (Presentation on Semi.org)
P-587 6-Axis Nanopositioning Stage Selected a Greatest Hit of 2005
by MICRO Magazine
NEXLINE® Linear Motors Piezo-Walk® Working Principle
NEXLINE® Ultra-High-Resolution Nanopositioning Drives
Closed-Loop Single-Axis Stages with Direct Metrology
Multi-Axis Stages, Parallel Kinematics / Parallel Metrology
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P-587 6-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage |
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P-563
PIMars™ XYZ Piezo Scanning- and Nanopositioning Stages |
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P-750
High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology |
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| Wafer Inspection, Nanometrology |
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See Examples Here |
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| Interferometry |
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S-303
High-Speed Piezo Phase Shifters with Direct Metrology Option |
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- Closed-Loop Piezo Actuators and Flexure-Guided Systems
NanoAutomation®
S-303 High-speed Piezoelectric Phase Shifters Now Available Closed- & Open-Loop
1000 µm Travel XY-Version Added to PIHera® Family of Piezo Nanopositioning Stages
1 – 3 Axis (Tripod) Piezo Phase Shifters / Tip-Tilt Platforms with Clear Aperture
Closed-Loop Single-Axis Stages with Direct Metrology
Microscopy Z-Stages / Objective Nanofocusing Systems
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P-725
PIFOC® Long-Range, High-Speed Nanofocusing Z-Drives |
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P-753 LISA Piezo NanoAutomation® Stages / Actuators with Direct Metrology |
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P-752
Piezo NanoAutomation® Stages with Direct Metrology |
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P-620PIHera® Miniature Long-Range Piezo Nanopositioning Stages |
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| Wire Bonding |
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PL-112
PICMA® Multilayer Piezo Bender Actuators |
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- Piezo Bender Actuators
- Disk Translators
Introduction to Piezo Actuators (Nano-Transducers)
Bender Actuators / Bimorph Actuators (travel ranges to 2 mm)
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P-286
Piezo Disk Translators |
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| Sub-nm Measurements (Nanometrology) |
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D-100
Sub-Nanometer-Resolution Capacitive Position Sensors |
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- Capacitive Position Sensors
Single-Probe Capacitive Position Gauge for Nanometrology Applications
Custom Sensors
Stability and Linearity of PI Capacitive Position Sensors
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| Optics Testing, 6-Axis Alignment |
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M-824
Compact 6-Axis Parallel Kinematics Microrobot |
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- Hexapod 6D Micropositioning System
Serial Kinematics vs. Parallel Kinematics
Hexapods (6D Parallel Kinematics)
More on Hexapods |
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M-850
Hexapod 6-Axis-Parallel Kinematics Microrobot |
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F-206
HexAlign™ 6-Axis Precision Alignment System / Manipulator (Hexapod)
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| Nanoalignment Systems with Long Range Travel Ranges |
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P-620PIHera® Miniature Long-Range Piezo Nanopositioning Stages |
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- Lever-Amplified Piezo Drives with up to 6 Axes
NEXLINE® Nano Drives
P-587 6-Axis Stage Selected a Greatest Hit of 2005 by MICRO Magazine
Closed-Loop Single-Axis Stages with Direct Metrology
Preloaded High-Load Piezo Stack Actuators, with Position Sensor (optional)
Multi-Axis Stages, Parallel Kinematics / Parallel Metrology
Z-Axis and Tip/Tilt Platforms
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P-239
Preloaded Open- & Closed-Loop Translators |
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P-601 PiezoMove® High-Precision Lever Amplified Z-Actuator with Flexure Guiding |
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P-587 6-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage |
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| Beam Scanning and Stabilization, Optical Path Correction |
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S-334
Ultra-Long-Range Piezo Tip/Tilt Mirror |
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Custom High-Resolution Systems: Active Optics / Steering Mirrors
Fast Steering Mirror, Tip-Tilt Platform & Active Optics Selection Guides
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S-340
High-Speed Piezo Tip/Tilt Platforms |
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| Active Vibration Cancellation |
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P-242
Preloaded High-Load Piezo Actuators with Sensor Option |
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- Piezo Stack Actuators and Ceramics
Read More about PI's Piezoceramic Manufacturing Division, PI Ceramics
A Study on the Reliability of Piezoelectric Multilayer Actuators
Preloaded Ultra High-load Piezo Stack Actuators, with Position Sensor (optional)
Custom Piezo Actuators
Tutorial: Piezoelectrics in Nanopositioning, Designing with Piezoelectric Actuators
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P-010.xxP
High Performance Ceramics |
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| High-Resolution Microscopy |
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See Examples Here |
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Low-Profile Piezo Z-stage with Tip/Tilt Option for Scanning Microscopy
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| Vertical Wafer Positioning |
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P-601
PiezoMove® High-Precision Lever Amplified Z-Actuator |
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- Piezo Z-Stages
- Standard Custom Stages with Piezo Linear Motors
NEXLINE® Piezo Linear Motors
Custom Stages
Z-Axis and Tip/Tilt Platforms
Multi-Axis Stages, Parallel Kinematics / Parallel Metrology
NEXLINE® Ultra-High-Resolution Nanopositioning Drives
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P-290Long-Travel Piezoelectric Z-Nanopositioning Flexure Stage / Actuator |
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M-714
Hybrid Piezo/DC-Motor Nanopositioning Z-Stage |
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P-541
Low-Profile Z/Tip/Tilt Piezo Nanopositioning Stages |
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P-528
Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages |
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P-587 6-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage |
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N-111
NEXLINE® Miniature High-Load Piezo Nanopositioning Drive |
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| Long-Range Placement and Positioning |
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N-214
NEXLINE® High-Load Piezo Nanopositioning Drive |
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- Motorized Translation Stages
- Motorized Rotation Stages
- PILine® Ultrasonic Motors
- NEXLINE® PiezoWalk® Motors
NEXLINE® Piezo Linear Motors
Custom Stages
PILine® Miniature Ultrasonic Motors
Features and Advantages of PILine® Ultrasonic Piezomotors
Translation Stages (DC-Servo, Stepper Motor, Manual)
Rotation Stages
NEXLINE® Ultra-High-Resolution Nanopositioning Drives
PILine® Ultrasonic Piezo Linear Motors for OEMs
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M-674
PILine® RodDrive Integrated Piezo Linear Motor Drive |
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M-511
Low-Profile, High-Load Translation Stages with Ballscrew Drives |
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M-038
Rotation Stages with Worm Gear Drive |
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M-060
Series Rotation Stages with Worm Gear Drive |
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* Other standard or custom solutions from PI could be even more suitable for your application. Talk to a PI Applications Engineer.
More white papers on piezo technology for semiconductor applications |
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