PI: Markets/Applications | Precision Solutions for Semiconductor Technology: Stages, Beam Steering, Scanners, Actuators for Lithography, Wafer/Optic Alignment, Mask Precision Positioning...

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	Semiconductor Technology
	Biotechnology, Life Science, ...
	Medical Design
	Microscopy
	Data Storage Technology
	Nanotechnology, Automation, ...
	Aeronautics, Image Processing
	Astronomy, Adaptive Optics
	Metrology / Laser-Systems / ...
	Precision Machining, Diamond Turning
	Photonics, Telecom, Integrated Optics

	Tutorial: Designing with Piezos
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	Hybrid Long-Travel Stage
	PCI Piezo Controller
	Flexure Linear Actuators
	Fast Z-Nanopositioning Stage
	Mini Piezo Flexure Stage
	Low-Cost Piezo Z-Stage / Nanofocussing
	Semi Award for NEXLINE® Nano Drive
	Vacuum Hexapod
	Scanning Microscopy Stage

Applications: PI Nanopositioning Products for Semiconductor Technology

Moore's Law keeps compressing IC line widths and feature-sizes. In order to keep up, nanopositioning mechanisms and precision motion control systems embedded in front-end production and metrology tools

must provide 10 to 1000x higher precision than feature size. Vibrations, position errors and drift need to be controlled to <0.1 nm (atom diameter). Conventional positioning systems do not provide the required stability and precision.

PI offers a wide variety of piezo based solutions from long-life PZT ceramics for vibration cancellation to the ultra-high-performance NEXLINE^® long-travel nanopositioning piezo motors.

Other precision motion products include piezo tilt platforms for fast beam stabilization / correction, piezo flexure stages for nanometrology applications, nanoalignment systems for mask alignment, and the new hybrid long-travel nanopositioning translation stages for linear and vertical positioning.

PI's capacitive nanometrology sensors measure motion down to the sub-nanometer range with very high bandwidth.

Technical Papers

NEXLINE^® Ultra-Precision High Force, Long Travel Actuator (Presentation on Semi.org)

IBM Interferometric Metrology Tool for Data Storage and Semiconductors

Nanometer Precise Hybrid Actuator in Positioning Mechanism with Long Travel Range.

Piezo-Based, Long-Travel Actuators For Special Environmental Conditions.

Nanopositioning: Keeping Pace

Why PI Piezo Actuators Provide Superior Lifetime

Extreme Piezo Lifetime Test Report

Properties of PZT Multilayer Actuators

A Study on the Reliability of Piezoelectric Multilayer Actuators



Nanoimprint, CD Testing, Mask and Wafer Alignment, Objective Precision Positioning, Lithography

	N-214 NEXLINE^® High-Load Piezo Nanopositioning Drive	XYZ θ_x θ_y θ_z Piezo Nanopositioning Stages Piezo Actuators PIFOC^® Nanofocusing Devices NEXLINE^® Nano Drives (Presentation on Semi.org) P-587 6-Axis Nanopositioning Stage Selected a Greatest Hit of 2005 by MICRO Magazine NEXLINE^® Linear Motors Piezo-Walk^® Working Principle NEXLINE^® Ultra-High-Resolution Nanopositioning Drives Closed-Loop Single-Axis Stages with Direct Metrology Multi-Axis Stages, Parallel Kinematics / Parallel Metrology
	P-587 6-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage
	P-563 PIMars^™ XYZ Piezo Scanning- and Nanopositioning Stages
	P-750 High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology

Wafer Inspection, Nanometrology

	See Examples Here

Interferometry

	S-303 High-Speed Piezo Phase Shifters with Direct Metrology Option	Closed-Loop Piezo Actuators and Flexure-Guided Systems NanoAutomation^® S-303 High-speed Piezoelectric Phase Shifters Now Available Closed- & Open-Loop 1000 µm Travel XY-Version Added to PIHera^® Family of Piezo Nanopositioning Stages 1 – 3 Axis (Tripod) Piezo Phase Shifters / Tip-Tilt Platforms with Clear Aperture Closed-Loop Single-Axis Stages with Direct Metrology Microscopy Z-Stages / Objective Nanofocusing Systems
	P-725 PIFOC® Long-Range, High-Speed Nanofocusing Z-Drives
	P-753 LISA Piezo NanoAutomation^® Stages / Actuators with Direct Metrology
	P-752 Piezo NanoAutomation^® Stages with Direct Metrology
	P-620 PIHera^® Miniature Long-Range Piezo Nanopositioning Stages

Wire Bonding

	PL-112 PICMA^® Multilayer Piezo Bender Actuators	Piezo Bender Actuators Disk Translators Introduction to Piezo Actuators (Nano-Transducers) Bender Actuators / Bimorph Actuators (travel ranges to 2 mm)
	P-286 Piezo Disk Translators

Sub-nm Measurements (Nanometrology)

	D-100 Sub-Nanometer-Resolution Capacitive Position Sensors	Capacitive Position Sensors Single-Probe Capacitive Position Gauge for Nanometrology Applications Custom Sensors Stability and Linearity of PI Capacitive Position Sensors

Optics Testing, 6-Axis Alignment

	M-824 Compact 6-Axis Parallel Kinematics Microrobot	Hexapod 6D Micropositioning System Serial Kinematics vs. Parallel Kinematics Hexapods (6D Parallel Kinematics) More on Hexapods
	M-850 Hexapod 6-Axis-Parallel Kinematics Microrobot
	F-206 HexAlign™ 6-Axis Precision Alignment System / Manipulator (Hexapod)

Nanoalignment Systems with Long Range Travel Ranges

	P-620 PIHera^® Miniature Long-Range Piezo Nanopositioning Stages	Lever-Amplified Piezo Drives with up to 6 Axes NEXLINE^® Nano Drives P-587 6-Axis Stage Selected a Greatest Hit of 2005 by MICRO Magazine Closed-Loop Single-Axis Stages with Direct Metrology Preloaded High-Load Piezo Stack Actuators, with Position Sensor (optional) Multi-Axis Stages, Parallel Kinematics / Parallel Metrology Z-Axis and Tip/Tilt Platforms
	P-239 Preloaded Open- & Closed-Loop Translators
	P-601 PiezoMove^® High-Precision Lever Amplified Z-Actuator with Flexure Guiding
	P-587 6-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage

Beam Scanning and Stabilization, Optical Path Correction

	S-334 Ultra-Long-Range Piezo Tip/Tilt Mirror	Tip/Tilt Mirror Systems Custom High-Resolution Systems: Active Optics / Steering Mirrors Fast Steering Mirror, Tip-Tilt Platform & Active Optics Selection Guides
	S-340 High-Speed Piezo Tip/Tilt Platforms

Active Vibration Cancellation

	P-242 Preloaded High-Load Piezo Actuators with Sensor Option	Piezo Stack Actuators and Ceramics Read More about PI's Piezoceramic Manufacturing Division, PI Ceramics A Study on the Reliability of Piezoelectric Multilayer Actuators Preloaded Ultra High-load Piezo Stack Actuators, with Position Sensor (optional) Custom Piezo Actuators Tutorial: Piezoelectrics in Nanopositioning, Designing with Piezoelectric Actuators
	P-010.xxP High Performance Ceramics

High-Resolution Microscopy

	See Examples Here	Low-Profile Piezo Z-stage with Tip/Tilt Option for Scanning Microscopy

Vertical Wafer Positioning

	P-601 PiezoMove^® High-Precision Lever Amplified Z-Actuator	Piezo Z-Stages Standard Custom Stages with Piezo Linear Motors NEXLINE^® Piezo Linear Motors Custom Stages Z-Axis and Tip/Tilt Platforms Multi-Axis Stages, Parallel Kinematics / Parallel Metrology NEXLINE^® Ultra-High-Resolution Nanopositioning Drives
	P-290 Long-Travel Piezoelectric Z-Nanopositioning Flexure Stage / Actuator
	M-714 Hybrid Piezo/DC-Motor Nanopositioning Z-Stage
	P-541 Low-Profile Z/Tip/Tilt Piezo Nanopositioning Stages
	P-528 Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages
	P-587 6-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage
	N-111 NEXLINE^® Miniature High-Load Piezo Nanopositioning Drive

Long-Range Placement and Positioning

	N-214 NEXLINE^® High-Load Piezo Nanopositioning Drive	Motorized Translation Stages Motorized Rotation Stages PILine^® Ultrasonic Motors NEXLINE^® PiezoWalk^® Motors NEXLINE^® Piezo Linear Motors Custom Stages PILine^® Miniature Ultrasonic Motors Features and Advantages of PILine^® Ultrasonic Piezomotors Translation Stages (DC-Servo, Stepper Motor, Manual) Rotation Stages NEXLINE^® Ultra-High-Resolution Nanopositioning Drives PILine^® Ultrasonic Piezo Linear Motors for OEMs
	M-674 PILine^® RodDrive Integrated Piezo Linear Motor Drive
	M-511 Low-Profile, High-Load Translation Stages with Ballscrew Drives
	M-038 Rotation Stages with Worm Gear Drive
	M-060 Series Rotation Stages with Worm Gear Drive
* Other standard or custom solutions from PI could be even more suitable for your application. Talk to a PI Applications Engineer. More white papers on piezo technology for semiconductor applications