Applications: PI Nanopositioning Products for Semiconductor Technology


Moore's Law keeps compressing IC line widths and feature-sizes. In order to keep up, nanopositioning mechanisms and precision motion control systems embedded in front-end production and metrology tools
must provide 10 to 1000x higher precision than feature size. Vibrations, position errors and drift need to be controlled to <0.1 nm (atom diameter). Conventional positioning systems do not provide the required stability and precision.

PI offers a wide variety of piezo based solutions from long-life PZT ceramics for vibration cancellation to the ultra-high-performance NEXLINE® long-travel nanopositioning piezo motors.

Other precision motion products include piezo tilt platforms for fast beam stabilization / correction, piezo flexure stages for nanometrology applications, nanoalignment systems for mask alignment, and the new hybrid long-travel nanopositioning translation stages for linear and vertical positioning.

PI's capacitive nanometrology sensors measure motion down to the sub-nanometer range with very high bandwidth.


Technical Papers
NEXLINE® Ultra-Precision High Force, Long Travel Actuator (Presentation on Semi.org)
IBM Interferometric Metrology Tool for Data Storage and Semiconductors
Nanometer Precise Hybrid Actuator in Positioning Mechanism with Long Travel Range.
Piezo-Based, Long-Travel Actuators For Special Environmental Conditions.
Nanopositioning: Keeping Pace

Why PI Piezo Actuators Provide Superior Lifetime
Extreme Piezo Lifetime Test Report
Properties of PZT Multilayer Actuators
A Study on the Reliability of Piezoelectric Multilayer Actuators
Nanoimprint, CD Testing, Mask and Wafer Alignment, Objective Precision Positioning, Lithography
N-216
NEXLINE® High-Load Piezo Nanopositioning Drive
  • XYZ θx θy θz Piezo Nanopositioning Stages
  • Piezo Actuators
  • PIFOC® Nanofocusing Devices
NEXLINE® Nano Drives (Presentation on Semi.org)
P-587 6-Axis Nanopositioning Stage Selected a Greatest Hit of 2005
     by MICRO Magazine

NEXLINE® Linear Motors Piezo-Walk® Working Principle
NEXLINE® Ultra-High-Resolution Nanopositioning Drives
Closed-Loop Single-Axis Stages with Direct Metrology
Multi-Axis Stages, Parallel Kinematics / Parallel Metrology
P-587 6-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage
P-563
PIMars XYZ Piezo Scanning- and Nanopositioning Stages
P-750
High-Load Piezo-Driven Nanopositioning Stages with Direct Metrology
Wafer Inspection, Nanometrology
See Examples Here
Interferometry
S-303
High-Speed Piezo Phase Shifters with Direct Metrology Option
  • Closed-Loop Piezo Actuators and Flexure-Guided Systems
NanoAutomation®
S-303 High-speed Piezoelectric Phase Shifters Now Available Closed- & Open-Loop
1000 µm Travel XY-Version Added to PIHera® Family of Piezo Nanopositioning Stages
1 – 3 Axis (Tripod) Piezo Phase Shifters / Tip-Tilt Platforms with Clear Aperture
Closed-Loop Single-Axis Stages with Direct Metrology
Microscopy Z-Stages / Objective Nanofocusing Systems
P-725
PIFOC® Long-Range, High-Speed Nanofocusing Z-Drives
P-753 LISA Piezo NanoAutomation® Stages / Actuators with Direct Metrology
P-752
Piezo NanoAutomation® Stages with Direct Metrology
P-620PIHera® Miniature Long-Range Piezo Nanopositioning Stages
Wire Bonding
PL-112
PICMA® Multilayer Piezo Bender Actuators
  • Piezo Bender Actuators
  • Disk Translators
Introduction to Piezo Actuators (Nano-Transducers)
Bender Actuators / Bimorph Actuators (travel ranges to 2 mm)
P-286
Piezo Disk Translators
Sub-nm Measurements (Nanometrology)
D-100
Sub-Nanometer-Resolution Capacitive Position Sensors
  • Capacitive Position Sensors
Single-Probe Capacitive Position Gauge for Nanometrology Applications
Custom Sensors
Stability and Linearity of PI Capacitive Position Sensors
Optics Testing, 6-Axis Alignment
M-824
Compact 6-Axis Parallel Kinematics Microrobot
  • Hexapod 6D Micropositioning System
Serial Kinematics vs. Parallel Kinematics
Hexapods (6D Parallel Kinematics)
More on Hexapods
M-850
Hexapod 6-Axis-Parallel Kinematics Microrobot
F-206
HexAlign™ 6-Axis Precision Alignment System / Manipulator (Hexapod)
Nanoalignment Systems with Long Range Travel Ranges
P-620PIHera® Miniature Long-Range Piezo Nanopositioning Stages
  • Lever-Amplified Piezo Drives with up to 6 Axes
NEXLINE® Nano Drives
P-587 6-Axis Stage Selected a Greatest Hit of 2005 by MICRO Magazine
Closed-Loop Single-Axis Stages with Direct Metrology
Preloaded High-Load Piezo Stack Actuators, with Position Sensor (optional)
Multi-Axis Stages, Parallel Kinematics / Parallel Metrology
Z-Axis and Tip/Tilt Platforms
P-239
Preloaded Open- & Closed-Loop Translators
P-601 PiezoMove® High-Precision Lever Amplified Z-Actuator with Flexure Guiding
P-587 6-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage
Beam Scanning and Stabilization, Optical Path Correction
S-334
Ultra-Long-Range Piezo Tip/Tilt Mirror
  • Tip/Tilt Mirror Systems
Custom High-Resolution Systems: Active Optics / Steering Mirrors
Fast Steering Mirror, Tip-Tilt Platform & Active Optics Selection Guides
S-340
High-Speed Piezo Tip/Tilt Platforms
Active Vibration Cancellation
P-242
Preloaded High-Load Piezo Actuators with Sensor Option
  • Piezo Stack Actuators and Ceramics
Read More about PI's Piezoceramic Manufacturing Division, PI Ceramics
A Study on the Reliability of Piezoelectric Multilayer Actuators
Preloaded Ultra High-load Piezo Stack Actuators, with Position Sensor (optional)
Custom Piezo Actuators
Tutorial: Piezoelectrics in Nanopositioning, Designing with Piezoelectric Actuators
P-010.xxP
High Performance Ceramics
High-Resolution Microscopy
See Examples Here Low-Profile Piezo Z-stage with Tip/Tilt Option for Scanning Microscopy

Vertical Wafer Positioning
P-601
PiezoMove® High-Precision Lever Amplified Z-Actuator
  • Piezo Z-Stages
  • Standard Custom Stages with Piezo Linear Motors
NEXLINE® Piezo Linear Motors
Custom Stages
Z-Axis and Tip/Tilt Platforms
Multi-Axis Stages, Parallel Kinematics / Parallel Metrology
NEXLINE® Ultra-High-Resolution Nanopositioning Drives
P-290Long-Travel Piezoelectric Z-Nanopositioning Flexure Stage / Actuator
M-714
Hybrid Piezo/DC-Motor Nanopositioning Z-Stage
P-541
Low-Profile Z/Tip/Tilt Piezo Nanopositioning Stages
P-528
Z/Tip/Tilt Piezo Flexure Nanopositioning / Scanning Stages
P-587 6-Axis, Long-Travel Piezo Nanopositioning / Scanning Stage
N-111
NEXLINE® Miniature High-Load Piezo Nanopositioning Drive
Long-Range Placement and Positioning
N-214
NEXLINE® High-Load Piezo Nanopositioning Drive
  • Motorized Translation Stages
  • Motorized Rotation Stages
  • PILine® Ultrasonic Motors
  • NEXLINE® PiezoWalk® Motors
NEXLINE® Piezo Linear Motors
Custom Stages
PILine® Miniature Ultrasonic Motors
Features and Advantages of PILine® Ultrasonic Piezomotors
Translation Stages (DC-Servo, Stepper Motor, Manual)
Rotation Stages
NEXLINE® Ultra-High-Resolution Nanopositioning Drives
PILine® Ultrasonic Piezo Linear Motors for OEMs
M-674
PILine® RodDrive Integrated Piezo Linear Motor Drive
M-511
Low-Profile, High-Load Translation Stages with Ballscrew Drives
M-038
Rotation Stages with Worm Gear Drive
M-060
Series Rotation Stages with Worm Gear Drive
* Other standard or custom solutions from PI could be even more suitable for your application. Talk to a PI Applications Engineer.
More white papers on piezo technology for semiconductor applications