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M-014 Ultra-High Precision Stages with Magnetic-Kinematic Bearings

The Latest Information on Micropositioning is Available Here

NOTES
See "Accessories" for adapters, brackets, etc.

ORDERING INFORMATION:
M-014.00 Translation Stage, 25 mm
M-014.P0 Translation Stage, 25 mm, Manual + PZT Drive
M-014.PS Translation Stage, 25 mm, Manual + Closed Loop PZT Drive
M-014.D0 Translation Stage, 25 mm, DC Motor Drive
M-014.DP Translation Stage, 25 mm, DC Motor + PZT Drive
M-014.DS Translation Stage, 25 mm, DC Motor + Closed Loop PZT Drive

UPGRADES:
M-014.U0 Upgrade Kit with Open Loop PZT Drive
M-014.US Upgrade Kit with Closed Loop PZT Drive
M-014.UD Factory Installed Upgrade Kit with DC Motor Drive and Limit Switches

TECHNICAL DATA:

Models

M-014.00

M-014.P0

M-014.PS

M-014.D0

M-014.DP

M-014.DS

Units

Notes

Travel range

25

25

25

25

25

25

mm

 

PZT fine travel range

 

45

45

 

45

45

µm

 

Min. incremental motion (PZT drive)

-

0.005

0.005

-

0.005

0.005

µm

A4

Repeatability (PZT drive)

-

-

0.09

-

-

0.09

µm

 

Design resolution (DC Motor)

-

-

-

0.059

0.059

0.059

µm

A3

Min. incremental motion

1

1

1

0.1

0.1

0.1

µm

A4

Unidirectional repeatability

-

-

-

0.1

0.1

0.1

µm

 

Bi-directional repeatability

-

-

-

5

5

5

µm

 

** Backlash

-

-

-

5*

5*

5*

µm

 

Straightness/ flatness per 5 mm

0.1

0.1

0.1

0.1

0.1

0.1

µm

 

Straightness/ flatness full travel

0.3

0.3

0.3

0.3

0.3

0.3

µm

 

Max. normal load capacity

5

5

5

5

5

5

kg

B1

Max. velocity

-

-

-

0.7

0.7

0.7

mm/sec

 

Max. push/pull force

15/5

15/5

15/5

15/5

15/5

15/5

N

B2

Max. lateral force

10

10

10

10

10

10

N

 

Drive

M-624 Micrometer

M-624 Micrometer

M-624 Micrometer

M-224.20
DC-Mike

M-224.20
DC-Mike

M-224.20
DC-Mike

   

PZT Drive

-

P-840.30

P-841.30

-

P-840.30

P-841.30

 

D1

Encoder resolution

-

-

-

60

60

60

counts/rev.

 

Drive screw pitch

0.5

0.5

0.5

0.5

0.5

0.5

mm/rev.

 

Gear ratio

-

-

-

(31/9)4 :1
» 141:1

(31/9)4 :1
» 141:1

(31/9)4 :1
» 141:1

   

Nominal motor power

-

-

-

2

2

2

W

 

Motor voltage range

-

-

-

0 to ±12

0 to ±12

0 to ±12

V

 

Weight

0.72

0.78

0.8

0.98

1.04

1.06

kg

 

Recommended motor controller

-

-

-

C-842, C-844

C-842, C-844

C-842, C-844

 

D2

Material

Al, St

Al, St

Al, St

Al, St

Al, St

Al, St

 

L

Recommended PZT controller

-

A, C, G

D, H

-

A, C, G

D, H

 

M

* gearhead ** the PZT drives are backlash free

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