M-510 Low Profile High Resolution Translation Stages
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M-510 Translation Stage
- Travel Range 100 mm
- Stress-Relieved Aluminum Stage Base for Highest Stability
- Zero-Backlash Recirculating Ballscrew
- Standard Limit Switches
- Load Capacity 100 kg
Quality control, semiconductor test equipment, metrology, disk drive test set-ups, R&D.
M-510 Series Translation Stages are designed to meet demanding positioning requirements. The stages combine a functional flat design to allow multiaxis combinations and feature a precision machined base from high-density, stressrelieved aluminum for exceptional stability and minimum weight. Precision ground recirculating ballscrews (better accuracy than rolled ballscrews) with preloaded nuts provide low friction, backlash free positioning.
High precision linear guiding rails with recirculating ball bearings guarantee 1 µm/100 mm straightness and flatness.
Drive Options for M-510 Stages
DC Motor Direct DriveA 6 Watt DC motor with shaft mounted 2000 counts/revolution optical encoder directly drives the ballscrew. This version features 0.5 µm minimum incremental motion and a velocity range up to 50 mm/sec.
DC Motor/Gearhead Drive
A 3 Watt DC motor with zero backlash gearhead and shaft mounted 2000 counts/revolution optical encoder is used. The gear ratio is 29.6:1, providing minimum incremental motion of 0.05 µm and maximum velocity of 3 mm/sec.
Stepper Motor Direct Drive
A high resolution 5-phase stepper motor with 2000 steps/revolution provides minimum incremental motion of 0.5 µm. Low vibrations, high angular stiffness and exceptional angle accuracy (equal step size) are the advantages of 5-phase motors over conventional 2 and 4-phase motors which must use electronic micro stepping techniques (with several disadvantages) to achieve comparable resolution.
Quality Control of M-510 Stages
Each M-510 stage is precision assembled, using laser interferometers to test the stage for its operating performance. Each stage is precision tuned to meet the demanding specifications that we guarantee. Individual stage data are available as option (M-500.90) for the most stringent test requirements.
