M-510 Low Profile High Resolution Translation Stages
The Latest Information on Micropositioning is Available Here
See "Accessories", for adapters, brackets, etc.
ORDERING INFORMATION:
M-510.12 Translation Stage, 100 mm, DC Motor/Gearhead
M-510.11 Translation Stage, 100 mm, DC Motor Direct Drive
M-510.10 Translation Stage, 100 mm, 5 Phase Stepper Motor
OPTIONS:
M-500.90 Linear and Guiding Accuracy Interferometric Test Sheet for M-500 Stages
M-590.00 Three-Point Support
M-592.00 Z-axis Mounting Bracket for Vertical Mount
| TECHNICAL DATA: | |||||
|
Models |
M-510.11 |
M-510.12 |
M-510.10 |
Units |
|
|
Travel range |
100 |
100 |
100 |
mm |
|
|
Design resolution |
0.5 |
0.017 |
0.5 |
µm |
A3 |
|
Min. incremental motion |
0.5 |
0.05 |
0.5 |
µm |
A4 |
|
Unidirectional repeatability |
0.5 |
0.1 |
0.5 |
µm |
|
|
Bi-directional repeatability |
1 |
1 |
1 |
µm |
|
|
Backlash |
1 |
1 |
1 |
µm |
|
|
Accuracy per 25 mm |
1 |
1 |
1 |
µm |
|
|
Accuracy full travel |
4 |
4 |
4 |
µm |
|
|
Straightness |
1 |
1 |
1 |
µm |
|
|
Flatness |
1 |
1 |
1 |
µm |
|
|
Pitch (q y) |
50 |
50 |
50 |
µrad |
|
|
Yaw (q z) |
50 |
50 |
50 |
µrad |
|
|
Max. velocity |
50 |
3 |
12 |
mm/sec |
|
|
Max. normal load capacity |
100 |
100 |
100 |
kg |
B1 |
|
Max. push/pull force |
50 / 50 |
50 / 50 |
50 / 50 |
N |
B2 |
|
Max. lateral force |
200 |
200 |
200 |
N |
|
|
Encoder resolution |
2000 |
2000 |
- |
counts/rev. |
|
|
Motor resolution |
- |
- |
2000 |
steps/rev. |
|
|
Ballscrew pitch |
1 |
1 |
1 |
mm/rev. |
|
|
Gear ratio |
- |
(28/12)4 :1 » 29.6:1 |
- |
||
|
Nominal motor power |
6 |
3 |
- * |
W |
|
|
Motor voltage range |
0 to ±12 |
0 to ±12 |
24 * |
V |
|
|
Weight |
2.5 |
2.5 |
2.5 |
kg |
|
|
Material |
Al |
Al |
Al |
L |
|
|
Recommended motor controller |
C-842 **, |
C-842, |
- |
D2 |
|
* 24 V chopper voltage, 0.5 A / phase, 8 ohms / phase.
** C-839 Power amplifier required.
