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M-500 Series Low Profile High Resolution Translation Stages

The Latest Information on Micropositioning is Available Here

See "Accessories", for adapters, brackets, etc.

ORDERING INFORMATION:
M-511.DG Translation Stage, 4", DC Motor/ Gearhead
M-511.DD Translation Stage, 4", DC Motor Direct Drive, 0.1 µm Linear Encoder
M-511.DDB Translation Stage, 4", DC Motor Direct Drive, 0.1 µm Linear Encoder, Brake
M-511.5S Translation Stage, 4", 5 Phase Stepper Motor
M-521.DG Translation Stage, 8", DC Motor/ Gearhead
M-521.DD Translation Stage, 8", DC Motor Direct Drive, 0.1 µm Linear Encoder
M-521.DDB Translation Stage, 8", DC Motor Direct Drive, 0.1 µm Linear Encoder, Brake
M-521.5S Translation Stage, 8", 5 Phase Stepper Motor
M-531.DG Translation Stage, 12", DC Motor/Gearhead
M-531.DD Translation Stage, 12", DC Motor Direct Drive, 0.1 µm Linear Encoder
M-531.DDB Translation Stage, 12", DC Motor Direct Drive, 0.1 µm Linear Encoder, Brake
M-531.5S Translation Stage, 12", 5 Phase Stepper Motor

OPTIONS:
M-500.90 Linear and Guiding Accuracy Interferometric Test Sheet for M-500 Stages
M-590.00 Three-Point Support
M-592.10 Z-axis Mounting Bracket for Vertical Mount of M-500 Series Stages
M-500.PS Power Supply for M-5x1.DD (included in M-5x1.DD)

TECHNICAL DATA:
Models	M-511.DD	M-511.DG	M-511.5S	M-521.DD	M-521.DG	M-521.5S	M-531.DD	M-531.DG	M-531.5S	Units	Notes
Travel range	102	102	102	204	204	204	306	306	306	mm
Design resolution	0.1	0.033	1	0.1	0.033	1	0.1	0.033	1	µm	A3
Min. incremental motion	0.1	0.1	1	0.1	0.1	1	0.1	0.1	1	µm	A4
Unidirectional repeatability	0.1	0.2	0.2	0.1	0.2	0.2	0.1	0.2	0.2	µm
Bi-directional repeatability	0.2	1	0.5	0.2	1	0.5	0.2	1	0.5	µm
Origin repeatability	1	1	1	1	1	1	1	1	1	µm
Backlash	-	1	0.5	-	1	0.5	-	1	0.5	µm
Accuracy per 50 mm	0.2	2	2	0.2	2	2	0.2	2	2	µm
Straightness / flatness per 100 mm	1	1	1	1	1	1	1	1	1	µm
Max. velocity	50	6	24	50	6	24	50	6	24	mm/sec
Max. normal load capacity	100	100	100	100	100	100	100	100	100	kg	B1
Max. push/ pull force	80 / 80	80 / 80	80 / 80	80 / 80	80 / 80	80 / 80	80 / 80	80 / 80	80 / 80	N	B2
Max. lateral force	200	200	200	200	200	200	200	200	200	N
Encoder resolution	0.1 µm *	2048	-	0.1 µm *	2048	-	0.1 µm *	2048		counts/rev.
Motor resolution	-	-	2000	-	-	2000	-	-	2000	steps/rev.
Ballscrew pitch	2	2	2	2	2	2	2	2	2	mm/rev.
Gear ratio	-	(28/12)4 : 1 » 29.6:1	-	-	(28/12)4 : 1 » 29.6:1	-	-	(28/12)4 : 1 » 29.6:1	-
Nominal motor power	30	3	- **	30	3	- **	30	3	- **	W
Motor voltage range	0 to ± 24	0 to ±12	24 **	0 to ± 24	0 to ±12	24 **	0 to ± 24	0 to ±12	24 **	V
Weight	5.0	4.9	4.9	6.1	6.0	6.0	7.2	7.1	7.1	kg
Material	Al	Al	Al	Al	Al	Al	Al	Al	Al		L
Recommended motor controller	C-842***, C-844	C-842, C-844	-	C-842***, C-844	C-842, C-844	-	C-842***, C-844	C-842, C-844	-		D2

* Linear encoder

** 24 V chopper voltage, 0.5 A / phase, 8 ohms / phase

*** C-842.xxB if ordered with Brake Option (Models M-5xx.DDB)

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