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M-041 - M-044 Tilt Stages

The Latest Information on Micropositioning is Available Here

NOTES
See "Accessories", for adapters, brackets, etc.

ORDERING INFORMATION:
M-041.00 Small Tilt Stage, qX, Manual Micrometer Drive
M-041.D0 Small Tilt Stage, qX, DC Motor Drive
M-042.00 Small Tilt Stage, qX qY, Manual Micrometer Drive
M-042.D0 Small Tilt Stage, qX, qY, DC Motor Drive
M-043.00 Tilt Stage, qX, Manual Micrometer Drive
M-043.D0 Tilt Stage, qX, DC Motor Drive
M-044.00 Tilt Stage, qX qY, Manual Micrometer Drive
M-044.D0 Tilt Stage, qX qY, DC Motor Drive

UPGRADES:
M-041.U0 Open Loop PZT Drive Upgrade Kit for M-041 Tilt Stages
M-041.US Closed Loop PZT Drive Upgrade Kit for M-041 Tilt Stages
M-042.U0 Open Loop PZT Drive Upgrade Kit for M-042 Tilt Stages
M-042.US Closed Loop PZT Drive Upgrade Kit for M-042 Tilt Stages
M-043.U0 Open Loop PZT Drive Upgrade Kit for M-043 Tilt Stages
M-043.US Closed Loop PZT Drive Upgrade Kit for M-043 Tilt Stages
M-044.U0 Open Loop PZT Drive Upgrade Kit for M-044 Tilt Stages
M-044.US Closed Loop PZT Drive Upgrade Kit for M-044 Tilt Stages

TECHNICAL DATA:

Models

M-041.00

M-042.00

M-043.00

M-044.00

M-041.D0

M-042.D0

M-043.D0

M-044.D0

Units

Notes

Tilt Axes

q X

q Xq Y

q X

q Xq Y

q X

q Xq Y

q X

q Xq Y

   

Tilt Range

± 9

± 9

± 7

± 7

± 9

± 9

± 7

± 7

deg (axis)

 

Fine Range
(PZT option)

±1.2

±0.6

±1.4

±1.4

±1.2

±0.6

±1.4

±1.4

mrad (axis)

 

Design resolution

-

-

-

-

4.7

4.7

3.8

3.8

µrad

A3

Min. incremental motion

80

80

65

65

15

15

12

12

µrad

A4

Min. incremental motion (PZT option)

0.5

0.5

0.5

0.5

0.5

0.5

0.5

0.5

µrad

A4

Rotation / linear input

80

80

65

65

80

80

65

65

µrad / µm

A5

Unidirectional repeatability

-

-

-

-

20

20

15

15

µrad

 

* Backlash

-

-

-

-

400

400

350

350

µrad

 

Max. velocity

-

-

-

-

3.2

3.2

2.6

2.6

deg/sec

 

Max. load (A)

4

4

5

5

4

4

5

5

kg

 

Max torque (B, C)

450, 150

450, 150

750, 250

750, 250

450, 150

450, 150

750, 250

750, 250

mNm

 

Drive

M-622 Micrometer

M-622 Micrometer

M-624 Micrometer

M-624 Micrometer

M-222.20 DC-Mike

M-222.20 DC-Mike

M-222.20 DC-Mike

M-222.20 DC-Mike

   

PZT drive (optional)

P-840.20 /
P-841.20

P-840.10 /
P-841.10

P-840.30 /
P-841.30

P-840.30 /
P-841.30

P-840.20 /
P-841.20

P-840.10 /
P-841.10

P-840.30 /
P-841.30

P-840.30 /
P-841.30

 

D1

Weight

0.4

0.6

0.8

1.2

0.5

0.7

0.9

1.5

kg

 

Material

Al

Al

Al

Al

Al

Al

Al

Al

 

L

* the PZT drives are backlash free

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