M-500 Series Low Profile High Resolution Translation Stages
The Latest Information on Micropositioning is Available Here
 M-511 XYZ Combination |
 M-511, M-521 and M-531 Translation Stages |
- Travel Ranges to 306 mm (12")
- Integrated DC Servo Power Amplifiers
- Optional Linear Scale Encoders for Highest Accuracy
- Stress-Relieved Aluminum Stage Base for Highest Stability
- Zero-Backlash Recirculating Ballscrews
- Standard Origin and Limit Switches
- Load Capacity 100 kg
M-500 Series Translation Stages are designed to meet demanding positioning requirements. The stages combine a functional flat design to allow multiaxis combinations and feature a precision machined base from high-density, stress-relieved aluminum for exceptional stability and minimum weight. Precision ground recirculating ballscrews (better accuracy than rolled ballscrews) with preloaded nuts provide low friction, backlash free positioning.
Versions with integrated linear scale encoder (direct output metrology) provide 0.1 µm minimum incremental motion and 1 µm full travel accuracy. High precision linear guiding rails with recirculating ball bearings guarantee 1 µm/100 mm straightness and flatness. All versions are equipped with non contact hall-effect origin switches and limit switches. An optional auto lock motor brake is available for the DC Motor Direct Drive versions (M-5x1.DDB) to secure the stage position when power is shut off.
Drive Options for M-500 Stages
DC Motor Direct Drive with Integrated Linear Encoder (Direct Output Metrology)This version features 0.1 µm minimum incremental motion and a velocity range up to 50 mm/sec (limited by bandwidth of the encoder counter circuit on C-842 and C-844 motor controllers). An optical linear encoder (mounted in the center of the stage, close to the ballscrew drive to prevent possible cosine errors) eliminates drivetrain errors such as non-linearity, backlash and elastic deformation. The linear encoder measures the actual position of the moving carriage directly, with exceptional accuracy. The encoder is based on an optical grating and a non contacting read head with integrated signal conditioner and interpolator.
For maximum dynamic performance the DC servo motors are directly driven by high efficiency PWM power amplifiers integrated into the stage. This unique design has several advantages:
- Extremely high efficiency by elimination of power losses between amplifier and motor
- Overall cost reduction, because no external amplifier is required
- Elimination of PWM amplifier noise radiation by mounting the amplifier and motor together in an electrically shielded case
DC Motor/Gearhead Drive
A 3 Watt DC motor with zero backlash gearhead and shaft mounted 2048 counts/revolution optical encoder is used. The gear ratio is 29.6:1, providing minimum incremental motion of 0.1 µm and maximum velocity of 6 mm/sec.
Stepper Motor Direct Drive
A high resolution 5-phase stepper motor with 2000 steps/revolution provides minimum incremental motion of 1 µm. Low vibrations, high angular stiffness and exceptional angle accuracy (equal step size) are the advantages of 5-phase motors over conventional 2 and 4p-phase motors which must use electronic micro stepping techniques (with several disadvantages) to achieve comparable resolution.
Quality Control of M-500 Stages
Each M-500 stage is precision assembled using laser interferometers to test the stage for its operating performance. Each stage is precision tuned to meet the demanding specifications that we guarantee. Individual stage data are available as option (M-500.90) for the most stringent test requirements.
