The mechanics (X or XY stage) are driven by integrated non-contact, zero-friction voice-coil actuators. Scan velocities up to 50 mm/sec over a range of 6 mm are feasible (model QuickScan V-101: up to 250 mm/sec). Integrated linear encoders provide position resolution of 0.1 µm. Non-contact hall effect origin switches (repeatability better than 1 µm) are standard, too. The digital controller comes on an ISA-Bus compatible PC-plug-in-card and features on-board linear amplifiers for two individual axes, a 32 bit PID-V-ff servo system and other goodies such as I/O lines and hardware interrupt capability. A mounting plate and software tools (LabView drivers, Libraries in C, Pascal, Basic ...) are included in the system.
Application examples: Semiconductor testing, medical analytical equipment, micro dispensing applications, optical device testing, lens testing, scanning microscopy, micro manufacturing.